Micro-fabrication of silicon/ceramic hybrid cantilever for atomic force microscope and sensor applications

Sensors and Actuators, A: Physical

Volumn 126, Issue 1, 2006, Pages 159-164

  Wakayama, Takayuki ^a   Kobayashi, Toshinari ^a   Iwata, Nobuya ^a   Tanifuji, Nozomi ^b   Matsuda, Yasuaki ^b   Yamada, Syoji ^a  

^a JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

^b Sumikin Ceramics and Quartz Co Ltd   (Japan)

Author keywords

Atomic force microscope; Micro fabrication; Silicon ceramic hybrid cantilever

Indexed keywords

ATOMIC FORCE MICROSCOPY; CERAMIC MATERIALS; NATURAL FREQUENCIES; PROBES; RESONANCE; SILICON;

MICRO-FABRICATION; SILICON/CERAMIC HYBRID CANTILEVER; TRANSFER SUBSTRATES; WAFER;

CANTILEVER BEAMS;

EID: 31044434407     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.05.005     Document Type: Article

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