Transfer function analysis of the micro cantilever used in atomic force microscopy

IEEE Transactions on Nanotechnology

Volumn 5, Issue 6, 2006, Pages 692-699

  Rubio Sierra, F Javier ^a   Vázquez, Rafael ^b   Stark, Robert W ^a  

^a UNIVERSITY OF MUNICH   (Germany)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Atomic force microscopy; Microelectromechanical devices; Nanotechnology; Transfer functions

Indexed keywords

ACTUATORS; ELECTRIC FIELDS; EQUATIONS OF MOTION; FREQUENCY RESPONSE; INTERFEROMETRY; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; TRANSFER FUNCTIONS;

DISTRIBUTED LOADS; ELECTROSTATIC FORCES; MICRO CANTILEVER; NONTRIVIAL SOLUTION;

ATOMIC FORCE MICROSCOPY;

EID: 33751519290     PISSN: 1536125X     EISSN: None     Source Type: Journal    
DOI: 10.1109/TNANO.2006.883479     Document Type: Article

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