Stiction and anti-stiction in MEMS and NEMS

Acta Mechanica Sinica/Lixue Xuebao

Volumn 19, Issue 1, 2003, Pages 1-10

  Zhao, Yapu ^a  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

Anti stiction; MEMS; Self assembled monolayer (SAM); Stiction; Work of adhesion

Indexed keywords

ACCELEROMETERS; MICROMACHINING; MICROSTRUCTURE; MONOLAYERS; STICTION;

ANTISTICTION; MICROELECTROMECHANICAL SYSTEMS; SELFASSEMBLED MONOLAYER; WORK OF ADHESION;

MICROELECTROMECHANICAL DEVICES;

EID: 0037872055     PISSN: 05677718     EISSN: None     Source Type: Journal    
DOI: 10.1007/bf02487448     Document Type: Article

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