Noise processes in nanomechanical resonators

Journal of Applied Physics

Volumn 92, Issue 5, 2002, Pages 2758-2769

  Cleland, A N ^a   Roukes, M L ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b California Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION DESORPTION; DOUBLY CLAMPED BEAM; NANO SCALE; NANOMECHANICAL RESONATORS; NATURAL RESONANCE FREQUENCIES; NOISE PROCESS; NOISE SOURCE; NON-FUNDAMENTAL NOISE; ON-CHIP CLOCKS; QUALITY FACTORS; RF FILTERS; SINGLE-CRYSTAL SI; THERMAL FLUCTUATIONS; THERMOMECHANICAL NOISE;

NATURAL FREQUENCIES; THERMOMECHANICAL TREATMENT;

RESONATORS;

EID: 0036732277     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1499745     Document Type: Article

References (28)

1. A. N. Cleland and M. L. Roukes, Appl. Phys. Lett. 69, 2653 (1996). apl APPLAB 0003-6951
2. A. N. Cleland and M. L. Roukes, Nature (London) 320, 160 (1998). nat NATUAS 0028-0836
3. Y. T. Yang, K. L. Ekinci, X. M. H. Huang, L. M. Schiavone, M. L. Roukes, C. A. Zorman, and M. Mehregany, Appl. Phys. Lett. 78, 162 (2001). apl APPLAB 0003-6951
4. K. Yasumura, T. Stowe, E. Chow, T. Pfafman, T. Keeny, B. Stipe, and D. Rugar, J. Microelectromech. Syst. 9, 117 (2000). jiy JMIYET 1057-7157
5. C. Nguyen and R. Howe, Proc. IEEE Intl. Freq. Control Symp. 48, 127 (1994).
6. K. Wang, A. Wong, and C. Nguyen, J. Microelectromech. Syst. 9, 347 (2000). jiy JMIYET 1057-7157
7. R. Lifshitz and M. Roukes, Phys. Rev. B 61, 5600 (2000). prb PRBMDO 0163-1829
8. F. Walls and J. Vig, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 42, 576 (1995). itu ITUCER 0885-3010
9. T. Gabrielson, IEEE Trans. Electron Devices 40, 903 (1993). etd IETDAI 0018-9383
10. L. Cutler and C. Searle, Proc. IEEE 54, 136 (1966). iee IEEPAD 0018-9219
11. Y. Yong and J. Vig, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 36, 452 (1989). itu ITUCER 0885-3010
12. J. Vig and Y. Kim, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 46, 1558 (1999). itu ITUCER 0885-3010
13. A. Nowick and B. Berry, Anelastic Relaxation in Crystalline Solids (Academic, New York, 1972).
14. T. Albrecht, P. Grütter, D. Horne, and D. Rugar, J. Appl. Phys. 69, 668 (1991). jap JAPIAU 0021-8979
15. S. Timoshenko, D. Young, and J. W. Weaver, Vibration Problems in Engineering (Wiley, New York, 1974).
16. X. Huang, K. Ekinci, Y. Yang, C. Zorman, and M. L. Roukes, (unpublished).
17. A. N. Cleland and M. L. Roukes, Sens. Actuators A 72, 256 (1999). sac SAAPEB 0924-4247
18. W. Egan, IEEE Trans. Instrum. Meas. 37, 240 (1988). eim IEIMAO 0018-9456
19. W. Robins, Phase Noise in Signal Sources (Peter Peregrinus Ltd., London, 1982).
20. D. Allan, Proc. IEEE 54, 221 (1966). iee IEEPAD 0018-9219
21. W. Egan, Frequency Synthesis by Phase Lock (Wiley, New York, 1981).
22. Hewlett-Packard 10811D/E application note.
23. L. Landau, E. Lifshitz, and L. Pitaevskii, Statistical Physics, 4th ed. (Pergamon, Oxford, 1980).
24. W. Mason and T. Bateman, Phys. Rev. A 134, 1387 (1964). pva PRVAAH 0096-8250
25. G. S. et al., J. Phys. Chem. Solids 48, 641 (1987). jpx JPCSAW 0022-3697
26. A. Zangwill, Physics at Surfaces (Cambridge University Press, New York, 1988).
27. S. Roorda, W. C. Sinke, J. M. Poate, D. C. Jacobson, D. Dierker, B. S. Dennis, D. J. Eaglesham, F. Spaepen and P. Fuoss, Phys. Rev. B 44, 3702 (1991). prb PRBMDO 0163-1829
28. P. Dutta, P. Dimon, and P. Horn, Phys. Rev. Lett. 43, 646 (1979). prl PRLTAO 0031-9007