Modelling and analysis of multiple cluster tools system with random failures using coloured Petri net

International Journal of Advanced Manufacturing Technology

Volumn 50, Issue 9-12, 2010, Pages 897-906

  Aized, Tauseef ^a  

^a UNIVERSITY OF ENGINEERING AND TECHNOLOGY   (Pakistan)

Author keywords

Coloured Petri net; Modelling; Multiple cluster tool system; Random failure

Indexed keywords

COLOURED PETRI NETS; CYCLE TIME; HIGHER YIELD; INPUT FACTORS; MODELLING; MODELLING AND SIMULATIONS; MULTIPLE CLUSTERS; OPERATION SYSTEM; PROCESS EXECUTION; PROCESSING MODULES; RANDOM FAILURES; SEMICONDUCTOR MANUFACTURING; SEMICONDUCTOR MANUFACTURING SYSTEMS; SYSTEM THROUGHPUT;

GRAPH THEORY; INDUSTRIAL APPLICATIONS; MANUFACTURE; PETRI NETS; TOOLS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 77957882546     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-010-2592-8     Document Type: Article

References (28)

1. R Uzsoy CY Lee LA Martin-Vega 1992 A review of production planning and scheduling models in the semiconductor industry. Part 1: system characteristics, performance evaluation and production planning IEEE Trans Sched Logist 24 47 59
2. YH Shin T Lee J Kim H Lee 2001 Modelling and implementing a real-time scheduler for dual-armed cluster tools Comput Ind 45 13 27 10.1016/S0166- 3615(01)00078-1 (Pubitemid 32518331)
3. LeBaron HT, Pool M (1994) The simulation of cluster tools: a new semiconductor manufacturing technology. Proc. of the 1994 winter simulation conference. pp 907-912
4. Yi J, Ding S, Song D (2005) Steady-state throughput and scheduling analysis of multi-cluster tools for semiconductor manufacturing. IEEE Int Conf Robot Autom Barcelona, Spain, pp 292-298
5. MJ Lopez SC Wood 2003 Systems of multiple cluster tools: configuration, reliability and performance IEEE Trans Semicond Manuf 16 2 170 178 10.1109/TSM.2003.810936
6. J Yi S Ding D Song MT Zhang 2008 Steady-state throughput and scheduling analysis of multicluster tools: a decomposition approach IEEE Trans Autom Sci Eng 5 2 321 336 10.1109/TASE.2007.906678 (Pubitemid 351506277)
7. Chien C, Dauzere-Peres S, Ehm H, Jiang Z, Krishnaswamy S, Monch L, Uzsoy R (2008) Modelling and analysis of semiconductor manufacturing in a shrinking world: challenges and successes. Proceedings of the 2008 Winter Simulation Conference. pp 2093-2099
8. MJ Lopez SC Wood 1998 Systems of multiple cluster tools: configuration and performance under perfect reliability IEEE Trans. Semicond Manuf 11 3 465 474 10.1109/66.705381
9. AK Gupta AI Sivakumar 2006 Job shop scheduling techniques in semiconductor manufacturing Int J Adv Manuf Technol 27 1163 1169 10.1007/s00170-004-2296-z (Pubitemid 43170416)
10. T Murata 1989 Petri nets: properties, analysis and applications Proc IEEE 77 541 580 10.1109/5.24143
11. WM Zuberek 2004 Cluster tools with chamber revisiting-modelling and analysis using timed Petri nets IEEE Trans Semicond Manuf 17 3 333 344 10.1109/TSM.2004.831524
12. RS Srinivasan 1998 Modelling and performance analysis of cluster tools using Petri nets IEEE Trans Semicond Manuf 11 394 403 10.1109/66.705374
13. JY Choi SA Reveliotis 2003 A generalized stochastic Petri net model for performance analysis and control of capacitated re-entrant lines IEEE Trans Robot Autom 19 3 474 480 10.1109/TRA.2003.810577
14. Yi J, Ding S, Zhang MT, Meulen P (2007) Throughput analysis of linear cluster tools. Proceedings of the 3rd Annual IEEE Conference on Automation Science and Engineering Scottsdale, AZ, USA, pp 1063-1068
15. HR Liu ZB Jiang RYK Fung 2007 The infrastructure of the timed EOPNs-based multiple objective real-time scheduling system for 300mm Wafer FAB Int J Prod Res 45 21 5017 5056 1126.90344 10.1080/00207540600595793 (Pubitemid 47507497)
16. Jung C, Lee T (2008) Efficient scheduling method based on an assignment model for robotized cluster tools. 4th IEEE Conference on Automation Science and Engineering, Key Bridge Marriott, Washington DC, USA, pp 79-84
17. J Kim T Lee 2008 Schedulability analysis of time-constrained cluster tools with bounded time variation by an extended Petri net IEEE Trans Autom Sci Eng 5 3 490 503 10.1109/TASE.2007.912716
18. N Wu C Chu F Chu MC Zhou 2008 A Petri net method for schedulability and scheduling problems in single-arm cluster tools with wafer residency time constraints IEEE Trans Semicond Manuf 21 2 224 237 10.1109/TSM.2008.2000425 (Pubitemid 351695248)
19. Ding S, Yi J (2004) An event graph-based simulation and scheduling analysis of multi cluster tools. Proceedings of the 2004 Winter Simulation Conference, pp 1915-1924
20. C Kuo C Wang K Huang 2003 Behavior modelling and control of 300-mm fab intrabays using distributed agent oriented Petri net IEEE Trans Syst Man Cybern Part A Syst Humans 33 5 641 648 10.1109/TSMCA.2003.817395
21. K Sorensen GK Janssens 2004 A Petri net model of a continuous flow transfer line with unreliable machines Eur J Oper Res 152 248 262 10.1016/S0377-2217(02)00653-7 2004451
22. Wood SC, Tripathy S, Moghadam F (1994) A generic model for cluster tool throughput time and capacity. IEEE/SEMI advanced semiconductor manufacturing conference, pp 194-199
23. WM Zuberek 2001 Timed petri nets in modelling and analysis of cluster tools IEEE Trans Robot Autom 17 5 562 575 10.1109/70.964658 (Pubitemid 33137773)
24. N Gharbi M Loualalen 2006 GSPN analysis of retrial systems with servers breakdowns and repairs Appl Math Comput 174 1151 1168 1156.68319 10.1016/j.amc.2005.06.005 2220604
25. Cao ZC, Qaio F, Wu Q (2007) Queuing generalized stochastic colored timed Petri nets-based approach to modelling for semiconductor wafer fabrication. IEEE International Conf. on Control and Automation, Guangzhou. China, pp 2834-2838
26. Zhou MC, Venkatesh K (1999) Modeling, simulation and control of flexible manufacturing systems. World Scientific Press
27. Jensen K (1992) Coloured Petri nets: basic concepts, analysis methods and practical use, vol. 1. Springer-Verlag
28. Robinson S (2002) A statistical process control approach for estimating the warm-up period. Proceedings of 2002 winter simulation conference, pp 439-445