Efficient scheduling method based on an assignment model for robotized cluster tools

4th IEEE Conference on Automation Science and Engineering, CASE 2008

Volumn , Issue , 2008, Pages 79-84

  Chihyun, Jung ^a   Lee, Tae Eog ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

FLOW PATTERNS; GRAPH THEORY; MATERIALS HANDLING; PETRI NETS; SCHEDULING; TRAVELING SALESMAN PROBLEM;

ASSIGNMENT PROBLEMS; CLEANING OPERATIONS; CLUSTER TOOLS; EFFICIENT ALGORITHMS; EFFICIENT SCHEDULING; INTERMEDIATE BUFFERS; MATERIAL HANDLINGS; MIXED INTEGER PROGRAMMING MODELS; MODELING; OPTIMAL SCHEDULES; PETRI NET MODELS; PETRI-NET; SCHEDULING PROBLEMS; SEMICONDUCTOR MANUFACTURING; THROUGHPUT RATES; WAFER PROCESSING;

INTEGER PROGRAMMING;

EID: 54949137369     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/COASE.2008.4626441     Document Type: Conference Paper

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