Queueing generalized stochastic colored timed Petri nets- Based approach to modeling for semiconductor wafer fabrication

2007 IEEE International Conference on Control and Automation, ICCA

Volumn , Issue , 2007, Pages 2834-2838

  Cao, Zheng Cai ^b   Qiao, Fei ^a,b   Wu, Qi Di ^a,b  

^a IEEE

^b TONGJI UNIVERSITY   (China)

Author keywords

Modeling; Queueing generalized stochastic colored timed Petri net; Semiconductor wafer fabrication

Indexed keywords

COMPUTER SIMULATION; SEMICONDUCTOR DEVICES; STOCHASTIC CONTROL SYSTEMS; SYSTEMS ANALYSIS; UNCERTAIN SYSTEMS;

QUEUEING GENERALIZED STOCHASTIC COLORED TIMED PETRI NET; SEMICONDUCTOR WAFER FABRICATION;

PETRI NETS;

EID: 44349139438     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICCA.2007.4376879     Document Type: Conference Paper

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