Steady-state throughput and scheduling analysis of multi-cluster tools for semiconductor manufacturing: A decomposition approach

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 2005, Issue , 2005, Pages 292-298

  Yi, Jingang ^a   Ding, Shengwei ^b   Song, Dezhen ^c  

^a Texas AandM University   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c TEXAS A AND M UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; ROBOTIC ASSEMBLY; ROBOTICS; SCHEDULING; THROUGHPUT;

CHEMICAL-MECHANICAL PLANARIZATION (CMP); SCHEDULING ALGORITHM; SEMICONDUCTOR MANUFACTURING; SINGLE CLUSTER TOOLS;

SEMICONDUCTOR MATERIALS;

EID: 33846122662     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ROBOT.2005.1570134     Document Type: Conference Paper

References (12)

1. T. Perkinson, P. McLarty, R. Gyurcsik, and R. Cavin, "Single-Wafer Cluster Tool Performance: An Analysis of Throughput," IEEE Trans. Semiconduct. Manufact., vol. 7, no. 3, pp. 369-373, 1994.
2. S. Venkatesh, R. Davenport, P. Foxhoven, and J. Nulman, "A Steady-State Throughput Analysis of Cluster Tools: Dual-Blade Versus Single-Blade Robots," IEEE Trans. Semiconduct. Manufact., vol. 10, no. 4, pp. 418-424, 1997.
3. R. Srinivasan, "Modeling and Performance Analysis of Cluster Tools Using Petri Nets," IEEE Trans. Semiconduct. Manufact., vol. 11, no. 3, pp. 394-403, 1998.
4. W. Zuberek, "Timed Petri Nets in Modeling and Analysis of Cluster Tools," IEEE Trans. Robot. Automat., vol. 17, no. 5, pp. 562-575, 2001.
5. S. Rostami, B. Hamidzadeh, and D. Camporese, "An Optimal Periodic Scheduler for Dual-Arm Robots in Cluster Tools with Residency Constraints," IEEE Trans. Robot. Automat., vol. 17, no. 5, pp. 609-618, 2001.
6. S. Rostami and B. Hamidzadeh, "Optimal Scheduling Techniques for Cluster Tools With Process-Module and Transport-Module Residency Constraints," IEEE Trans. Semiconduct. Manufact., vol. 15, no. 3, pp. 341-349, 2002.
7. Q. Su and F. Chen, "Optimal Sequencing of Double-Gripper Granty Robot Moves in Tightly-Coupled Serial Production Systems," IEEE Trans. Robot. Automat., vol. 12, no. 1, pp. 22-30, 1996.
8. Y. Crama, V. Kats, J. van de Klundert, and E. Levner, "Cyclic Scheduling of Robotic Flowshops," Annals of Operations Research, vol. 96, no. 1, pp. 97-124, 2000.
9. D. Jevtic, "Method and aparatus for managing scheduling a multiple cluster tool," European Patent 1,132,792 (A2), Dec., 2001.
10. D. Jevtic and S. Venkatesh, "Method and aparatus for scheduling wafer processing within a multiple chamber semiconductor wafer processing tool having a multiple blade robot," U.S. Patent 6,224,638, May, 2001.
11. M. Dawande, C. Sriskandarajah, and S. Sethi, "On Throughtput Maximization in Constant Travel-Time Robotic Cells," Manufacturing & Service Operations Management, vol. 4, no. 4, pp. 296-312, 2002.
12. S. Ding and J. Yi, "An Event Graph Based Simulation and Scheduling Analysis of Multi-Cluster Tools," in Proceedings of the 2004 Winter Simulation Conference, Washington, DC, 2004, pp. 1417-1422.