Throughput analysis of linear cluster tools

Proceedings of the 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007

Volumn , Issue , 2007, Pages 1063-1068

  Yi, Jingang ^a   Ding, Shengwei ^b   Zhang, Mike Tao ^c   Van Der Meulen, Peter ^d  

^a UTC Aerospace Systems   (United States)

^b DEPARTMENT OF INDUSTRIAL ENGINEERING AND OPERATIONS RESEARCH   (United States)

^c Submicron Development Center   (United States)

^d BlueShift Technologies Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LINEAR CLUSTER TOOLS; THROUGHPUT ANALYSIS;

ALGORITHMS; INDUSTRIAL ROBOTS; ROBOTICS; SEMICONDUCTOR DEVICE MANUFACTURE; THROUGHPUT;

SCHEDULING;

EID: 44449176198     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/COASE.2007.4341849     Document Type: Conference Paper

References (16)

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