Modeling and performance analysis of cluster tools using petri nets

IEEE Transactions on Semiconductor Manufacturing

Volumn 11, Issue 3, 1998, Pages 394-403

  Srinivasan, R S ^a  

^a APPLIED MATERIALS INC   (United States)

Author keywords

Manufacturing; Petri nets; Systems analysis and design

Indexed keywords

PETRI NETS; SEMICONDUCTOR DEVICE MODELS; SYSTEMS ANALYSIS;

CLUSTER TOOLS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0032136168     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.705374     Document Type: Article

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