Behavior modeling and control of 300 mm fab intrabays using distributed agent oriented Petri net

IEEE Transactions on Systems, Man, and Cybernetics Part A:Systems and Humans.

Volumn 33, Issue 5, 2003, Pages 641-648

  Kuo, Chung Hsien ^a   Wang, Chao Hsiung ^a   Huang, Kuo Wei ^a  

^a CHANG GUNG UNIVERSITY   (Taiwan)

Author keywords

Dispatching; Distributed multiagent system; Modeling; Overhead hoist transport; Petri net

Indexed keywords

AUTOMATION; COMPUTER SIMULATION; DATABASE SYSTEMS; DISTRIBUTED COMPUTER SYSTEMS; END EFFECTORS; MULTI AGENT SYSTEMS; PETRI NETS; PROCESS CONTROL; USER INTERFACES;

DISPATCHING; DISTRIBUTED AGENT ORIENTED PETRI NET; DISTRIBUTED MULTIAGENT SYSTEM; FAB INTRABAYS; INTEGRATED CIRCUIT FOUNDRY FAB; OVERHEAD HOIST TRANSPORTS;

INTEGRATED CIRCUIT LAYOUT;

EID: 0344961675     PISSN: 10834427     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSMCA.2003.817395     Document Type: Letter

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