Analysis of the vibration modes of piezoelectric circular microdiaphragms

Journal of Micromechanics and Microengineering

Volumn 20, Issue 8, 2010, Pages

  Olfatnia, M ^a   Singh, V R ^a   Xu, T ^a   Miao, J M ^a   Ong, L S ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL METHOD; DIFFERENT FREQUENCY; DIFFERENT MODES; DIGITAL HOLOGRAPHY MICROSCOPE; ELECTRODE CONFIGURATIONS; EXCITATION VOLTAGE; EXPERIMENTAL MEASUREMENTS; FINITE ELEMENT SIMULATIONS; FREQUENCY SHIFT; FUNDAMENTAL MODES; GEOMETRIC NON-LINEARITY; HIGHER FREQUENCIES; HIGHER MODE; IMPEDANCE CHARACTERIZATION; MASS LOADINGS; MEMS TECHNOLOGY; NEW YORK; NODAL DIAMETER; ORTHOGONAL MODES; PZT THIN FILM; RESONANCE FREQUENCIES; RESONANT FREQUENCIES; VIBRATION MODES;

COMPUTER GENERATED HOLOGRAPHY; NATURAL FREQUENCIES; PIEZOELECTRICITY; VIBRATING CONVEYORS;

VIBRATION ANALYSIS;

EID: 77957766202     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/8/085013     Document Type: Article

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