Piezoelectric microphone built on circular diaphragm

Sensors and Actuators, A: Physical

Volumn 144, Issue 2, 2008, Pages 367-373

  Lee, Woon Seob ^a   Lee, Seung S ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Boron etch stop method; Circular diaphragm; MEMS; Piezoelectric microphone; ZnO

Indexed keywords

DIAPHRAGMS; MEMS; MICROPHONES; PIEZOELECTRIC MATERIALS;

BORON ETCH STOP METHOD; CIRCULAR DIAPHRAGM; PIEZOELECTRIC MICROPHONE;

PIEZOELECTRIC DEVICES;

EID: 43549099520     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.02.001     Document Type: Article

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