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Volumn 16, Issue 9, 2006, Pages

A MEMS acoustic energy harvester

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC INTENSITY; ACOUSTOELECTRIC EFFECTS; DIAPHRAGMS; MATHEMATICAL MODELS; MICROMACHINING;

EID: 33747302325     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/9/S02     Document Type: Article
Times cited : (227)

References (16)
  • 12
    • 33747215859 scopus 로고    scopus 로고
    • Horowitz S 2005 Development of a MEMS-based acoustic energy harvester PhD Dissertation University of Florida, Gainesville, FL
    • (2005) PhD Dissertation
    • Horowitz, S.1
  • 15
    • 0035425634 scopus 로고    scopus 로고
    • Highly sensitive triaxial silicon accelerometer with integrated PZT thin film detectors
    • Kunz K, Enoksson P and Stemme G 2001 Highly sensitive triaxial silicon accelerometer with integrated PZT thin film detectors Sensors Actuators A 92 156-60
    • (2001) Sensors Actuators , vol.92 , Issue.1-3 , pp. 156-160
    • Kunz, K.1    Enoksson, P.2    Stemme, G.3
  • 16
    • 33747295875 scopus 로고    scopus 로고
    • Chandrasekaran V 2004 Thermoelastically actuated acoustic proximity sensor with integrated electrical through-wafer interconnects PhD Dissertation University of Florida, Gainesville, FL
    • (2004) PhD Dissertation
    • Chandrasekaran, V.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.