Micromachined piezoelectric membranes with high nominal quality factors in newtonian liquid media: A Lamb's model validation at the microscale

Sensors and Actuators, B: Chemical

Volumn 123, Issue 2, 2007, Pages 860-868

  Ayela, Cédric ^a   Nicu, Liviu ^a  

^a LAAS CNRS   (France)

Author keywords

Liquid media; MEMS; Piezoelectric; Quality factor; Resonant frequency

Indexed keywords

GLYCEROL; LIQUID MEMBRANES; MIXTURES; MOLECULAR VIBRATIONS; NATURAL FREQUENCIES; NEWTONIAN LIQUIDS; SURFACE MICROMACHINING; VISCOSITY;

CANTILEVERS; PIEZOELECTRIC MEMBRANES; QUALITY FACTORS; REAL TIME BIOLOGICAL MEASUREMENT;

PIEZOELECTRIC MATERIALS;

EID: 34247644789     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2006.10.048     Document Type: Article

References (22)

1. Gizeli E., and Lowe C.R. Biomolecular Sensors (2002), Taylor and Francis, London
2. Gooding J.J. Biosensor technology for detecting biological warfare agents: recent progress and future trends. Anal. Chim. Acta 559 (2006) 137-151
3. Gimzewski J.K., Gerber C., Meyer E., and Schlittler R.R. Observation of a chemical reaction using a micromechanical sensor. Chem. Phys. Lett. 217 (1994) 589-594
4. Berger R., Gerber C., Lang H.P., and Gimzewski J.K. Micromechanics: a toolbox for femtoscale science: "Towards a laboratory on a tip". Microelectron. Eng. 35 (1997) 373-379
5. Abadal G., Davis Z.J., Helbo B., Borris X., Ruiz R., Boisen A., Campabadal F., Esteve J., Figueras E., Perez-Murano F., and Barniol N. Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection. Nanotechnology 12 (2001) 100-104
6. Bergaud C., and Nicu L. Viscosity measurements based on experimental investigations of composite cantilevers beam eigenfrequencies in viscous media. Rev. Sci. Instrum. 71 (2000) 2487-2491
7. Boskovic S., Chon J.W.M., Mulvaney P., and Sader J.E. Rheological measurements using microcantilevers. J. Rheol. 46 (2002) 891-899
8. Tamayo J., Humphris A.D.L., Malloy A.M., and Miles M.J. Chemical sensors and biosensors in liquid environment based on microcantilevers with amplified quality factor. Ultramicroscopy 86 (2001) 167-173
9. Ghatkesar M.K., Barwich V., Braun T., Bredekamp A.H., Drechsler U., Despont M., Lang H.P., Hegner M., and Gerber C. Real-time mass sensing by nanomechanical resonators in fluid. Proceedings of the 3rd IEEE Conference on Sensors. Viena, Austria, 24-27 October (2004) 1060-1063
10. Legrand B., Rollier A.S., Collard D., and Buchaillot L. Suppression of the pull-in instability for parallel-plate electrostatic actuators operated in dielectric liquids. Appl. Phys. Lett. 88 (2006) 034105
11. Itoh T., Chu J., Misumi I., Kataoka K., and Suga T. New dynamic scanning force microscopes using piezoelectric PZT microcantilevers. Proceedings of the International Conference on Solid-State Sensors and Actuators (Transducers '97). Chicago, USA, June 16-19 (1997) 459-462
12. 3 thick films and determination of their electromechanical characteristics. Adv. Funct. Mater. 15 (2005) 2021-2028
13. Muralt P., Ledermann N., Baborowski J., Barzegar A., Gentil S., Belgacem B., Petitgrand S., Bosseboeuf A., and Setter N. Piezoelectric micromachined ultrasonic transducers based on PZT thin films. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 52 (2005) 2276-2288
14. Guirardel M., Nicu L., Saya D., Tauran Y., Cattan E., Remiens D., and Bergaud C. Detection of gold colloid adsorption at a solid/liquid interface using micromachined piezoelectric resonators. Jpn. J. Appl. Phys. Lett. 43 (2004) L111-L114
15. Nicu L., Guirardel M., Chambosse F., Rougerie P., Hinh S., Trevisiol E., François J.-M., Majoral J.-P., Caminade A.-M., Cattan E., and Bergaud C. Resonating piezoelectric membranes for microelectromechanically-based bioassay: detection of streptavidin-gold nanoparticles interaction with biotinylated DNA. Sens. Actuators B 110 (2005) 125-136
16. Lamb H. On the vibrations of an elastic plate in contact with water. Proc. Roy. Soc. Lond. A 98 (1920) 205-216
17. Guyton A.C., and Hall J.E. Textbook of Medical Physiology. 10th ed. (2000), W.B. Saunders, Philadelphia, USA
18. Jaffe B., Cook W., and Jaffe H. Piezoelectric Ceramics (1971), Academic Press, New York, USA
19. Jaber B., Remiens D., Cattan E., Tronc P., and Thierry B. Characterization of ferroelectric and piezoelectric properties of lead titanate thin films deposited on Si by sputtering. Sens. Actuators A 63 (1997) 91-96
20. Blevins R.D. Formulas for Natural Frequency and Mode Shape (1979), Van Nostrand Reinhold Company, New York, USA
21. 3 thin films using multilayer buckled micromembranes. J. Appl. Phys. 100 (2006) 054908
22. Blackstock D.T. Fundamentals of Physical Acoustics (2000), Wiley-Interscience Publications, USA