Sensor diaphragm under initial tension: Linear analysis

Experimental Mechanics

Volumn 45, Issue 2, 2005, Pages 123-129

  Yu, M ^a   Balachandran, B ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

Diaphragm; Linear analysis; Plate with inplane tension; Pressure sensor

Indexed keywords

DIAPHRAGMS; LINEAR EQUATIONS; MATHEMATICAL MODELS; PARTIAL DIFFERENTIAL EQUATIONS; PLATES (STRUCTURAL COMPONENTS); SENSORS; STRUCTURAL DESIGN; TENSILE TESTING;

LINEAR ANALYSIS; PLATE WITH INPLANE TENSION; PLATE-MEMBRANE STRUCTURE; PRESSURE SENSOR; SENSOR DIAPHRAGM;

STRUCTURAL ANALYSIS;

DIAPHRAGM; DYNAMIC BEHAVIOR;

EID: 24144454622     PISSN: 00144851     EISSN: None     Source Type: Journal    
DOI: 10.1177/0014485105052319     Document Type: Article

References (10)

1. Matsuoka, Y., Yamamoto, Y., Tanabe, M., Shimada, S., Yamada, K., Yasukawa, A., and Matsuzaka, H., "Low-pressure Measurement Limits for Silicon Piezoresistive Circular Diaphragm Sensors," Journal of Micromechanics and Microengineering, 5, 32-35 (1995).
2. Pedersen, M., Meijerink, M.G.H., Olthuis, W., and Bergveld, P., "A Capacitive Differential Pressure Sensor with Polyimide Diaphragm," Journal of Micromechanics and Microengineering, 7, 250-252 (1997).
3. Xiao, Z, Engström, O., and Vidovic, N., "Diaphragm Deflection of Silicon Interferometer Structures Used as Pressure Sensors," Sensors and Actuators A, 58, 99-107 (1997).
4. Zeng, N., Shi, C., Wang, D., Zhang, M., and Liao, Y., "Diaphragm-type Fiber-optic Interferometric Acoustic Sensor" Optical Engineering, 42 (9), 2558-2562 (2003).
5. Yu, M., "Fiber-optic Sensor Systems for Acoustic Measurements," Ph.D. Dissertation, University of Maryland, College Park, MD (2002).
6. Yu, M. and Balachandran, B., "Acoustic Measurements Using a Fiber-optic Sensor System," Journal of Intelligent Material Systems and Structures, 14 (7), 409-414 (2003).
7. Zuckerwar, A.J., "Theoretical Response of Condenser Microphone," Journal of the Acoustical Society of America, 64, 1278-1285 (1978).
8. Sheplak, M. and Dugundji, J., "Large Deflections of Clamped Circular Plates under Initial Tension and Transitions to Membrane Behavior," ASME Journal of Applied Mechanics, 65 (1), 107-115 (1998).
9. Soedel, W., Vibrations of Shells and Plates, Marcel Dekker New York (1993).
10. Mansfield. E.H., The Bending and Stretching of Plates, Pergamon Press New York (1964).