A novel micromachined pump based on thick-film piezoelectric actuation

Sensors and Actuators, A: Physical

Volumn 70, Issue 1-2, 1998, Pages 98-103

  Koch, Michael ^a   Harris, Nick ^a   Evans, Alan G R ^a   White, Neil M ^a   Brunnschweiler, Arthur ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

Membrane actuator; Micropump; PZT; Silicon micromachining; Thick film technology

Indexed keywords

EID: 0042638062     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00120-4     Document Type: Article

References (13)

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