The principle of a MEMS circular diaphragm mass sensor

Journal of Micromechanics and Microengineering

Volumn 16, Issue 8, 2006, Pages 1487-1493

  Ismail, A K ^a   Burdess, J S ^a   Harris, A J ^a   McNeil, C J ^a   Hedley, J ^a   Chang, S C ^a   Suarez, G ^a  

^a NEWCASTLE UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; PRODUCT DESIGN; SENSORS; STRESS ANALYSIS; TEMPERATURE DISTRIBUTION;

CIRCULAR DIAPHRAGM; CYCLICALLY SYMMETRIC STRUCTURE; FREQUENCY SPLIT; RESONANT MASS SENSOR;

DIAPHRAGMS;

EID: 33746298054     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/8/008     Document Type: Article

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