Piezoelectric aluminum nitride MEMS annular dual contour mode filter

Sensors and Actuators, A: Physical

Volumn 134, Issue 1, 2007, Pages 152-160

  Stephanou, Philip J ^a   Piazza, Gianluca ^b   White, Carolyn D ^a   Wijesundara, Muthu B J ^a   Pisano, Albert P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

Aluminum nitride; Bandpass filter; Contour mode; Dual mode resonator; Piezoelectric resonator; RF MEMS

Indexed keywords

ALUMINUM COMPOUNDS; BANDWIDTH; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC DEVICES; RESONATORS;

DUAL MODE RESONATORS; ELECTRICALLY COUPLED RESONATORS; MULTI-POLE FILTERS; PIEZOELECTRIC RESONATOR;

BANDPASS FILTERS;

EID: 33847261567     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.04.032     Document Type: Article

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