Plasma dynamics of a confined extreme ultraviolet light source

Physics of Plasmas

Volumn 17, Issue 9, 2010, Pages

  Yeates, P ^a   Kennedy, E T ^a  

^a DUBLIN CITY UNIVERSITY   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM TARGET; DEPTH 3; EMISSION LINES; ENHANCED EMISSION; EXTREME ULTRAVIOLET LIGHT SOURCES; FUNDAMENTAL WAVELENGTH; HIGHLY CHARGED IONS; LASER PLASMA; LINE EMISSIONS; ND: YAG; PLANAR SURFACE; PLASMA DYNAMICS; PLASMA FORMATIONS; PLASMA PLUME EXPANSION; PLASMA PLUMES; PULSE ENERGIES; RECTANGULAR CAVITY; STRONG ENHANCEMENT; SURFACE COLLISIONS; TARGET SURFACE; TIME-SCALES; WAVELENGTH RANGES;

ALUMINUM; CAVITY RESONATORS; DYNAMICS; EXTREME ULTRAVIOLET LITHOGRAPHY; GLASS LASERS; LIGHT SOURCES; MAGNETOHYDRODYNAMICS; NEODYMIUM LASERS; PLASMA DIAGNOSTICS; THERMAL PLUMES; ULTRAVIOLET RADIATION;

COLLISIONAL PLASMAS;

EID: 77957747442     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3484227     Document Type: Article

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