EUV source developments on laser-produced plasmas using cryogenic Xe and lithium new scheme target

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6151 II, Issue , 2006, Pages

  Miyamoto, Shuji ^a   Amano, Sho ^a   Inoue, Takahiro ^a   Nica, Petru Edward ^a   Shimoura, Atsushi ^a   Kaku, Kakyo ^a   Sekioka, Tsuguhisa ^b   Mochizuki, Takayasu ^a  

^a Laboratory of Advanced Science and Technology for Industry   (Japan)

^b UNIVERSITY OF HYOGO   (Japan)

Author keywords

EUV source; Forced Recombination; Laser Produced Plasma; Lithium; Xenon

Indexed keywords

LASER PRODUCED PLASMAS; LIGHT SOURCES; LITHIUM; MIRRORS; MULTILAYERS; XENON;

CONVERSION EFFICIENCY (CE); DOUBLE PULSE IRRADIATION; EUV SOURCES; FORCED RECOMBINATION;

ULTRAVIOLET RADIATION;

EID: 33745585304     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.656458     Document Type: Conference Paper

References (13)

1. For example, 4th International EUVL Symposium, San Diego, USA, SEMATECH, 7-9 Nov. (2005).
2. A. Sasaki, K. Nishihara, M. Murakami, F. Koike, T. Kagawa, T. Nishikawa, K. Fujima, T. Kawamura and H. Furukawa, Appl. Phys. Lett, vol.85, 5857(2004).
3. A. Shimoura, S. Amano, S. Miyamoto, and T. Mochizuki, Appl. Phys. Lett. vol.72, 164 (1998).
4. A. Shimoura, T. Mochizuki, S. Miyamoto, S. Amano and T. Uyama, "Soft x-ray spectra from laser-heated cryogenic rare gas targets", Review of Laser Engineering, vol.27, pp.787-789 (1999).
5. T. Mochizuki, A. Shimoura, S. Amano and S. Miyamoto, "Compact High-Average-Power Laser-Plasma X-ray Source by Cryogenic Target", Proc. of SPIE of Applications of X Rays Generated from Lasers and Other Bright Sources II, vol. 4504, San Diego, USA, 30-31 July (2001).
6. T. Mochizuki, A. Shimoura, K. Fukugaki, T. Inoue, S. Miyamoto and S. Amano, "Studies on x-ray conversion efficiency in Xe cryogenic targets", 2nd International EUVL Symposium, Antwerp, Belgium, 30 Sept. to 2 Oct. (2003).
7. Shuji Miyamoto, S. Amano, A. Shimoura, K. Fukugaki, T. Inoue, H. Kinugasa and T. Mochizuki, "Improvement of EUV conversion efficiency in laser-produced plasmas by Xe cryogenic target", 3rd International EUVL Symposium, Miyazaki, Japan, 1-5 Nov., (2004).
8. Shuji Miyamoto, A. Shimoura, S. Amano, K. Fukugaki, H. Kinugasa, T. Inoue, and T. Mochizuki, "Laser wavelength and spot diameter dependence of EUV conversion efficiency in omega, 2-omega, and 3-omega Nd:YAG laser-produced plasmas", Appl. Phys. Lett., vol. 87, 052527APL (2005).
9. D.Myers, et al., 3rd Int. EUVL Symposium, So03, Miyazaki, Japan, 2-4 Nov. (2004).
10. Shuji Miyamoto, S. Amano, T. Inoue, P. E. Nica, A. Shimoura, K. Kaku, and T. Mochizuki, "EUV source developments on laser-produced plasmas using lithium new scheme target', 4th International Extreme Ultraviolet Lithography Symposium, San Diego, USA, 7-9 Nov. (2005).
11. S.Amano, T.Mochizuki, "Image Relaying in High-Average-Power Slab Laser System", Review of Laser Engineering, vol.29, pp.679-682 (2001).
12. S.Amano, T.Mochizuki, "Dynamic characteristics of high-repetition-rate flash lamps in high power slab laser", Optics Communications, 201, pp.173-178 (2002).
13. D. Colombant, G.F. Tonon, J. Appl. Phys., vol. 44, 3524 (1973).