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Volumn 112, Issue Part 4, 2008, Pages

3D PIC simulation of ion debris mitigation by B-field for LPP-EUV source

Author keywords

[No Author keywords available]

Indexed keywords

COLLECTOR EFFICIENCY; DEBRIS; ELECTRIC FIELDS; EXPANSION; EXTREME ULTRAVIOLET LITHOGRAPHY; FUSION REACTIONS; INERTIAL CONFINEMENT FUSION; IONS; KINETIC ENERGY; KINETICS; LASER FUSION; LASER PRODUCED PLASMAS; LIGHT SOURCES; MAGNETIC FIELDS; MAGNETIC MIRRORS; MAGNETISM; MIRRORS; PLASMA DIAGNOSTICS; PLASMA SIMULATION; PLASMA STABILITY; ULTRAVIOLET DEVICES;

EID: 77957726273     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/112/4/042061     Document Type: Conference Paper
Times cited : (2)

References (13)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.