|
Volumn 112, Issue Part 4, 2008, Pages
|
3D PIC simulation of ion debris mitigation by B-field for LPP-EUV source
|
Author keywords
[No Author keywords available]
|
Indexed keywords
COLLECTOR EFFICIENCY;
DEBRIS;
ELECTRIC FIELDS;
EXPANSION;
EXTREME ULTRAVIOLET LITHOGRAPHY;
FUSION REACTIONS;
INERTIAL CONFINEMENT FUSION;
IONS;
KINETIC ENERGY;
KINETICS;
LASER FUSION;
LASER PRODUCED PLASMAS;
LIGHT SOURCES;
MAGNETIC FIELDS;
MAGNETIC MIRRORS;
MAGNETISM;
MIRRORS;
PLASMA DIAGNOSTICS;
PLASMA SIMULATION;
PLASMA STABILITY;
ULTRAVIOLET DEVICES;
3-D PIC SIMULATIONS;
DEBRIS MITIGATION;
EUV LIGHT SOURCES;
EXTERNAL MAGNETIC FIELD;
INTERCHANGE INSTABILITY;
ION KINETIC ENERGY;
PARTICLE SIMULATIONS;
PLASMA EXPANSION;
MAGNETOPLASMA;
|
EID: 77957726273
PISSN: 17426588
EISSN: 17426596
Source Type: Conference Proceeding
DOI: 10.1088/1742-6596/112/4/042061 Document Type: Conference Paper |
Times cited : (2)
|
References (13)
|