Geometric effects on EUV emissions in spherical and planar targets

Journal of Physics: Conference Series

Volumn 112, Issue Part 4, 2008, Pages

  Tillack, M S ^a   Sequoia, K L ^a   Tao, Y ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLUID DYNAMICS; FUSION REACTIONS; HYDRODYNAMICS; INERTIAL CONFINEMENT FUSION; LASER PRODUCED PLASMAS; MICROSPHERES; PLASMA INTERACTIONS;

ATOMIC EMISSION; EUV EMISSIONS; GEOMETRIC EFFECTS; LASER ABSORPTION; MICROSPHERE TARGETS; PLANAR TARGET; PLASMA EXPANSION; RADIATION HYDRODYNAMICS;

LASER FUSION;

EID: 57349177965     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/112/4/042060     Document Type: Conference Paper

References (7)

1. Brandt D C 2006 LPP EUV Source Development for HVM SEMATECH EUVL Symposium 2006 (Barcelona Spain)
2. Tao Y, Tillack M S, Harilal S S, Sequoia K L and Najmabadi F 2007 Investigation of the interaction of a laser pulse with a preformed Gaussian Sn plume for an extreme ultraviolet lithography source, J. Appl. Phys. 101 (2) 023305
3. Hipp M, Woisetschläger J, Reiterer P and Neger T 2004 Digital evaluation of interferograms, Meas. 36 53-66
4. Harilal S S, O'Shay J, Tillack M S, Tao Y, Paguio R, Nikroo A and Back C A 2006 Spectral control of emissions from Sn-doped targets for EUV lithography, J. Phys. D: Appl. Phys. 39 484-487
5. h2d is a commercial product of Cascade Applied Sciences Incorporated, 6325 Trevarton Drive, Longmont, CO 80503. Electronic mail: larsen@casinc.com
6. private communication with Stephanie Hansen, LLNL
7. Gu M F 2003 Indirect X-Ray Line-Formation Processes in Iron L-Shell Ions, The Astrophysical J. 582 1241-1250