Generation of soft X-rays and extreme ultraviolet (EUV) using a laser-irradiated gas puff target

Laser and Particle Beams

Volumn 23, Issue 3, 2005, Pages 365-373

  Fiedorowicz, Henryk ^a  

^a MILITARY UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Extreme ultraviolet (EUV); Gas puff target; Laser plasmas; X rays

Indexed keywords

IRRADIATION; LITHOGRAPHY; MICROSCOPIC EXAMINATION; NANOTECHNOLOGY; PLASMA DEVICES; TARGETS; X RAY ANALYSIS;

EXTREME ULTRAVIOLET (EUV); GAS PUFF TARGET; LASER PLASMAS;

LASER PULSES;

EID: 25644431973     PISSN: 02630346     EISSN: None     Source Type: Journal    
DOI: 10.1017/S0263034605050524     Document Type: Article

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