Optimum laser-produced plasma for extreme ultraviolet light source

Journal of Physics: Conference Series

Volumn 112, Issue Part 4, 2008, Pages

  Fujioka, S ^a   Nishimura, H ^a   Shimomura, M ^a   Sakaguchi, H ^a   Nakai, Y ^a   Aota, T ^a   Shimada, Y ^b   Sunahara, A ^b   Nishihara, K ^a   Miyanaga, N ^a   Izawa, Y ^a   Mima, K ^a  

^a OSAKA UNIVERSITY   (Japan)

^b INSTITUTE FOR LASER TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOM LASERS; DEBRIS; EXTREME ULTRAVIOLET LITHOGRAPHY; FUSION REACTIONS; INERTIAL CONFINEMENT FUSION; LASER FUSION; LASER PRODUCED PLASMAS; LIGHT; LIGHT SOURCES; PLASMA THEORY; TIN; ULTRAVIOLET DEVICES;

EXTREME ULTRAVIOLET LIGHT SOURCES; LASER SPOT SIZE; MINIMUM MASS; OPTICALLY THIN PLASMAS; OUT-OF-BAND RADIATION; PLASMA CONDITIONS; SPECTRAL PURITY; VACUUM ULTRAVIOLETS;

ULTRAVIOLET LASERS;

EID: 84996486724     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/112/4/042049     Document Type: Conference Paper

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