Determination of charge state, energy and angular distributions of tin ions emitted from laser produced plasma based EUV sources

Journal of Physics: Conference Series

Volumn 58, Issue 1, 2007, Pages 391-394

  Morris, O ^a   Hayden, P ^a   Dunne, P ^a   O'Reilly, F ^a   O'Sullivan, G ^a   Sokell, E ^a   Antonsen, E L ^b   Srivastava, S N ^b   Thompson, K C ^b   Ruzic, D N ^b  

^a UNIVERSITY COLLEGE DUBLIN   (Ireland)

^b University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33947361188     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/58/1/089     Document Type: Article

References (6)

1. Bajt S, Alameda J B, Barbee T W, Clift W M, Folta J A, Kaufmann B B and Spiller E A 2001 Proceedings SPIE 4506 65
2. Hayden P et al 2005 Proceedings SPIE 5826 154
3. O'Sullivan G and Faulkner R 1994 Opt. Eng. 33 3978
4. Takenoshita K et al 2005 Proceedings SPIE 5751 563
5. Hayden P et al 2006 J. Appl. Phys. 99 093302
6. Alman A et al 2005 Proceedings SPIE 5751 1118