Vibration displacement on substrate due to time-harmonic stress sources from a micromechanical resonator

Journal of Sound and Vibration

Volumn 322, Issue 1-2, 2009, Pages 196-215

  Hao, Zhili ^a   Xu, Yang ^a  

^a Old Dominion University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC WAVES; ELASTICITY; FOURIER TRANSFORMS; HARMONIC ANALYSIS; MEMS; MICROELECTROMECHANICAL DEVICES; RESONATORS; VIBRATORS; WAVES;

ELASTIC MEDIUMS; HANKEL TRANSFORMS; MATHEMATICAL EXPRESSIONS; MICRO-MECHANICAL RESONATORS; MICROELECTROMECHANICAL-SYSTEMS TECHNOLOGIES; RESONATOR DESIGNS; SEMI INFINITES; SUBSTRATE MATERIALS; SUPPORT LOSS; TIME HARMONICS; VIBRATION ENERGIES; WAVE THEORIES;

SUBSTRATES;

EID: 61749091629     PISSN: 0022460X     EISSN: 10958568     Source Type: Journal    
DOI: 10.1016/j.jsv.2008.11.004     Document Type: Article

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