A thermal-energy method for calculating thermoelastic damping in micromechanical resonators

Journal of Sound and Vibration

Volumn 322, Issue 4-5, 2009, Pages 870-882

  Hao, Zhili ^a   Xu, Yang ^a   Durgam, Shiva Krishna ^a  

^a Old Dominion University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SOFTWARE; DAMPING; HEAT CONDUCTION; OPTICAL ANISOTROPY; RESONATORS;

A THERMALS; ANISOTROPIC MATERIALS; BEAM RESONATORS; COMPLEX VALUES; ENERGY METHODS; EXPERIMENTAL DATUM; FINITE-ELEMENT MODELING; GOVERNING EQUATIONS; ISOTROPIC AND ANISOTROPIC MATERIALS; MATHEMATICAL EXPRESSIONS; MICRO-MECHANICAL RESONATORS; MODAL SIMULATIONS; NUMERICAL SIMULATIONS; NUMERICAL VALUES; STRUCTURAL GEOMETRIES; THEORETICAL SOLUTIONS; THERMO-ELASTIC DAMPING; THERMODYNAMIC PARAMETERS; TRANSIENT HEAT CONDUCTIONS;

THERMOELASTICITY;

EID: 63549117029     PISSN: 0022460X     EISSN: 10958568     Source Type: Journal    
DOI: 10.1016/j.jsv.2008.12.005     Document Type: Article

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