Sol-gel-deposited ZnO thin films: A review

Materials Science and Engineering: B

Volumn 174, Issue 1-3, 2010, Pages 18-30

  Znaidi, Lamia ^a  

^a UNIVERSITÉ PARIS 13   (France)

Author keywords

c Axis; Colloids; Preferential orientation; Sol gel; Thin films; Zinc oxide

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; COATINGS; FILM PREPARATION; HEAT TREATMENT; II-VI SEMICONDUCTORS; METALLIC FILMS; NANOCRYSTALS; OPTOELECTRONIC DEVICES; OXIDE FILMS; PARTICLE SIZE; PIEZOELECTRICITY; SOL-GEL PROCESS; SOL-GELS; THIN FILMS; WIDE BAND GAP SEMICONDUCTORS;

C-AXIS; C-AXIS ORIENTATIONS; CRYSTALLOGRAPHIC ANISOTROPY; OPTOELECTRONICS DEVICES; PREFERENTIAL ORIENTATION; SHORT WAVELENGTHS; SOL'GEL; THIN-FILMS; ZNO FILMS; ZNO THIN FILM;

ZINC OXIDE;

EID: 77956455482     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2010.07.001     Document Type: Conference Paper

References (135)

1. D.C. Look Mater. Sci. Eng., B 80 2001 383 387
2. R. Triboulet, and J. Perrire Prog. Cryst. Growth Charact. Mater. 47 2003 65 138
3. Y.-S. Kim, W.-P. Tai, and S.-J. Shu Thin Solid Films 491 2005 153 160
4. C. Shaoqiang, Z. Jian, F. Xiao, W. Xiaohua, L. Laiqiang, S. Yanling, X. Qingsong, W. Chang, Z. Jianzhong, and Z. Ziqiang Appl. Surf. Sci. 241 2005 384 391
5. Z. Ye, G. Yuan, B. Li, L. Zhu, B. Zhao, and J. Huang Mater. Chem. Phys. 93 2005 170 173
6. R. Ghosh, B. Mallik, S. Fujihara, and D. Basak Chem. Phys. Lett. 403 2005 415 419
7. T. Makino, C.H. Chia, Nguen T. Tuan, Y. Segawa, M. Kawasaki, A. Ohtomo, K. Tamura, and H. Koinuma Appl. Phys. Lett. 77 2000 1632 1634
8. D.C. Reynolds, D.C. Look, and B. Jogai Solid State Commun. 99 1996 873 875
9. P. Zu, Z.K. Tang, G.K.L. Wong, M. Kawasaki, A. Ohtomo, H. Koinuma, and Y. Segawa Solid State Commun. 103 1997 459 463
10. D.M. Bagnall, Y.F. Chen, Z. Zhu, T. Yao, S. Koyama, M.Y. Shen, and T. Goto Appl. Phys. Lett. 70 1997 2230 2232
11. Y. Segawa, A. Ohtomo, M. Kawasaki, H. Koinuma, Z.K. Tang, P. Yu, and G.K.L. Wong Phys. Status Solidi B 202 1997 669 672
12. D.M. Bagnall, Y.F. Chen, M.Y. Shen, Z. Zhu, T. Goto, and T. Yao J. Cryst. Growth 184-185 1998 605 609
13. P. Yu, Z.K. Tang, G.K.L. Wong, M. Kawasaki, A. Ohtomo, H. Koinuma, and Y. Segawa J. Cryst. Growth 184-185 1998 601 604
14. Z.K. Tang, G.K.L. Wong, P. Yu, M. Kawasaki, A. Ohtomo, H. Koinuma, and Y. Segawa Appl. Phys. Lett. 72 1998 3270 3272
15. M. Kawasaki, A. Ohtomo, I. Ohkubo, H. Koinuma, Z.K. Tang, P. Yu, G.K.L. Wong, B.P. Zhang, and Y. Segawa Mater. Sci. Eng., B 56 1998 239 245
16. A. Ohtomo, M. Kawasaki, Y. Sakurai, Y. Yoshida, H. Koinuma, P. Yu, Z.K. Tang, G.K.L. Wong, and Y. Segawa Mater. Sci. Eng., B 54 1998 24 28
17. H. Lin, S. Zhou, T. Huang, H. Teng, X. Liu, S. Gu, S. Zhu, Z. Xie, P. Han, and R. Zhang J. Alloys Compd. 467 2009 L8 L10
18. M. Wraback, H. Shen, S. Liang, C.-R. Gorla, and Y. Lu Appl. Phys. Lett. 74 1999 507 509
19. D.-M. Schaadt, O. Brandt, S. Ghosh, T. Flissikowski, U. Jahn, and H.-T. Grahn Appl. Phys. Lett. 90 2007 231117 231119
20. R. Romero, D. Leinen, E.-A. Dalchiele, J.-R. Ramos-Barrado, and F. Martín Thin Solid Films 515 2006 1942 1949
21. P.-M. Martin, M.-S. Good, J.-W. Johnston, G.-J. Posakony, L.-J. Bond, and S.-L. Crawford Thin Solid Films 379 2000 253 258
22. R. Ondo-Ndong, F. Delannoy, A. Giani, A. Boyer, and A. Foucaran Mater. Sci. Eng., B 97 2003 68 73
23. R. Ondo-Ndong, G. Ferblantier, M. Al Khalfioui, A. Boyer, and A. Foucaran J. Cryst. Growth 255 2003 130 135
24. R. Al Asmar, G. Ferblantier, F. Mailly, and A. Foucaran Phys. Status Solidi C 2 2005 1331 1335
25. R. Al Asmar, G. Ferblantier, Fredrick Mailly, P. Gall-Borrut, and A. Foucaran Thin Solid Films 473 2005 49 53
26. S.M. Abrarov, Sh.U. Yuldashev, T.W. Kim, S.B. Lee, H.Y. Kwon, and T.W. Kang J. Lumin. 114 2005 118 124
27. S.M. Abrarov, Sh.U. Yuldashev, T.W. Kim, S.B. Lee, Y.H. Kwon, and T.W. Kang Opt. Commun. 250 2005 111 119
28. R. Ayouchi, D. Leinen, F. Martin, M. Gabas, E. Dalchiele, and J.R. Ramos-Barrado Thin Solid Films 426 2003 68 77
29. T. Pauporte, and D. Lincot Electrochim. Acta 45 2000 3345 3353
30. E.-B. Yousfi, J. Fouache, and D. Lincot Appl. Surf. Sci. 153 2000 223 234
31. E. Matijević Acc. Chem. Res. 14 1981 22 29
32. U. Koch, A. Fojtik, H. Weller, and A. Henglein Chem. Phys. Lett. 122 1985 507 510
33. D.W. Bahnemann, C. Kormann, and M.R. Hoffmann J. Phys. Chem. 91 1987 3789 3798
34. M. Haase, H. Weller, and A. Henglein J. Phys. Chem. 92 1988 482 487
35. A. Chittofrati, and E. Matijević Colloids Surf. 48 1990 65 78
36. L. Spanhel, and M.A. Anderson J. Am. Chem. Soc. 113 1991 2826 2833
37. P.V. Kamat, and B. Patrick J. Phys. Chem. 96 1992 6829 6834
38. S. Sakohara, M. Ishida, and M.A. Anderson J. Phys. Chem. B 102 1998 10169 10175
39. M. Hilgendorff, L. Spanhel, Ch. Rothenhäusler, and G. Müller J. Electrochem. Soc. 145 1998 3632 3637
40. E.A. Meulenkamp J. Phys. Chem. B 102 1998 5566 5572
41. E.M. Wong, J.E. Bonevich, and P.C. Searson J. Phys. Chem. B 102 1998 7770 7775
42. Z. Hu, G. Oskam, and P.C. Searson J. Colloid Interface Sci. 263 2003 454 460
43. T. Okamura, Y. Seki, S. Nagakari, and H. Okushi Jpn. J. Appl. Phys. 31 1992 L762 L764
44. Y. Ohya, H. Saiki, and Y. Takahashi J. Mater. Sci. 29 1994 4099 4103
45. M. Ohyama, H. Kozuka, T. Yoko, and S. Sakka J. Ceram. Soc. Jpn. 104 1996 296 300
46. D. Bao, H. Gu, and A. Kuang Thin Solid Films 312 1998 37 39
47. L. Znaidi, G.J.A.A. Soler Illia, R. Le Guennic, C. Sanchez, and A. Kanaev J. Sol-Gel Sci. Technol. 26 2003 817 821
48. L. Znaidi, G.J.A.A. Soler Illia, S. Benyahia, C. Sanchez, and A.V. Kanaev Thin Solid Films 428 2003 257 262
49. S. Ben Yahia, L. Znaidi, A. Kanaev, and J.P. Petitet Spectrochim. Acta, Part A 71 2008 1234 1238
50. J. Livage, and D. Ganguli Sol. Energy Mater. Sol. Cells 68 2001 365 381
51. J. Livage Curr. Opin. Solid State Mater. Sci. 2 1997 132 138
52. M. Guglielmi, and G. Carturan J. Non-Cryst. Solids 100 1988 16 30
53. M.Z.-C. Hu, E.A. Payzant, and C.H. Byers J. Colloid Interface Sci. 222 2000 20 36
54. A.C. Pierre Introduction to Sol-Gel Processing 1998 Kluwer Academic Publishers Boston/Dordrecht/London pp. 91-167
55. L. Armelao, M. Fabrizio, S. Gialanella, and F. Zordan Thin Solid Films 394 2001 90 96
56. E. Hosono, S. Fujihara, T. Kimura, and H. Imai J. Sol-Gel Sci. Technol. 29 2004 71 79
57. D. Sun, M. Wong, L. Sun, Y. Li, N. Miyatake, and H.J. Sue J. Sol-Gel Sci. Technol. 43 2007 237 243
58. Sigma Aldrich Data: Physical properties of solvents, http://www. sigmaaldrich.com/img/assets/13620/LabBasics
59. S. Fujihara, E. Hosono, and T. Kimura J. Sol-Gel Sci. Technol. 31 2004 165 168
60. H. Wang, C. Xie, and D. Zeng J. Cryst. Growth 277 2005 372 377
61. M.S. Tokumoto, V. Briois, C.V. Santilli, and S.H. Pulcinelli J. Sol-Gel Sci. Technol. 26 2003 547 551
62. Y. Natsume, and H. Sakata Thin Solid Films 372 2000 30 36
63. A.E.J. González, J.A.S. Urueta, and R.S. Parra J. Cryst. Growth 192 1998 430 438
64. A.M.P. Santos, and E.J.P. Santos Thin Solid Films 516 2008 6210 6214
65. A.M.P. Santos, and E.J.P. Santos Mater. Lett. 61 2007 3432 3435
66. P. Sagar, P.K. Shishodia, and R.M. Mehra Appl. Surf. Sci. 253 2007 5419 5424
67. P. Sagara, P.K. Shishodiaa, R.M. Mehra, H. Okadab, A. Wakaharab, and A. Yoshida J. Lumin. 126 2007 800 806
68. Z. Liu, Z. Jin, W. Li, and J. Qiu Mater. Lett. 59 2005 3620 3625
69. Z. Liu, J. Li, J. Ya, Y. Xin, and Z. Jin Mater. Lett. 62 2008 1190 1193
70. M. Wang, E.J. Kim, J.S. Chung, E.W. Shin, S.H. Hahn, K.E. Lee, and C. Park Phys. Status Solidi A 203 2006 2418 2425
71. N. Kumar, R. Kaur, and R.M. Mehra J. Lumin. 126 2007 784 788
72. J. Wang, Y. Qi, Z. Zhi, J. Guo, M. Li, and Y. Zhang Smart Mater. Struct. 16 2007 2673 2679
73. X.H. Wang, J. Shi, S. Dai, and Y. Yang Thin Solid Films 429 2003 102 107
74. M.P. Bole, and D.S. Patil J. Phys. Chem. Solids 70 2009 466 471
75. Y. Kavanagh, and D.C. Cameron Thin Solid Films 398-399 2001 24 28
76. L. Bahadur, and T.N. Rao J. Photochem. Photobiol., A 91 1995 233 240
77. R. Brenier, and L. Ortéga J. Sol-Gel Sci. Technol. 29 2004 137 145
78. J. Petersen, C. Brimont, M. Gallart, O. Crégut, G. Schmerber, P. Gilliot, B. Hönerlage, C. Ulhaq-Bouillet, J.L. Rehspringer, C. Leuvrey, S. Colis, A. Slaoui, and A. Dinia Microelectron. J. 40 2009 239 241
79. D. Raoufi, and T. Raoufi Appl. Surf. Sci. 255 2009 5812 5817
80. S. O'Brien a, L.H.K. Koh, and G.M. Crean Thin Solid Films 516 2008 1391 1395
81. J. Rao, R.J. Winfield, L.H.K. Koh, S. O'Brien, and G.M. Crean Phys. Status Solidi A 205 2008 1938 1942
82. L.Y. Lin, and D.E. Kim Thin Solid Films 517 2009 1690 1700
83. M.H. Aslan, A.Y. Oral, E. Menur, A. Gl, and E. Baaran Sol. Energy Mater. Sol. Cells 82 2004 543 552
84. S. Chakrabarti, D. Ganguli, and S. Chaudhuri Mater. Lett. 58 2004 3952 3957
85. Z. Jiwei, Z. Liangying, and Y. Xi Ceram. Int. 26 2000 883 885
86. M. Wang, J. Wang, W. Chen, Y. Cui, and L. Wang Mater. Chem. Phys. 97 2006 219 225
87. H.Y. Bae, and G.M. Choi Sens. Actuators, B 55 1999 47 54
88. Y. Ohya, H. Saiki, T. Tanaka, and Y. Takahashi J. Am. Ceram. Soc. 79 1996 825 830
89. Y. Takahashi, M. Kanamori, A. Kondoh, H. Minoura, and Y. Ohya Jpn. J. Appl. Phys. 33 1994 6611 6615
90. S. Mridha, and D. Basak Mater. Res. Bull. 42 2007 875 882
91. M. Dutta, S. Mridha, and D. Basak Appl. Surf. Sci. 254 2008 2743 2747
92. D. Basak, G. Amin, B. Mallick, G.K. Paul, and S.K. Sen J. Cryst. Growth 256 2003 73 77
93. R. Ghosh, D. Basak, and S. Fujihara J. Appl. Phys. 96 2004 2689 2692
94. R. Ghosh, S. Fujihara, and D. Basak J. Electron. Mater. 35 2006 1728 1733
95. Y. Zhang, B. Lin, X. Sun, and Z. Fu Appl. Phys. Lett. 86 2005 131910/1 131910/3
96. B. Pal, and M. Sharon Mater. Chem. Phys. 76 2002 82 87
97. A. Abdel Aal, S.A. Mahmoud, and A.K. Aboul-Gheit Nanoscale Res. Lett. 4 2009 627 634
98. Y. Caglar, S. Ilican, M. Caglar, F. Yakuphanoglu, J. Wu, K. Gao, P. Lu, and D. Xue J. Alloys Compd. 481 2009 885 889
99. M. Ohyama, H. Kozuka, and T. Yoko Thin Solid Films 306 1997 78 85
100. H. Li, J. Wang, H. Liu, H. Zhang, and X. Li J. Cryst. Growth 275 2005 e943 e946
101. H. Li, J. Wang, H. Liu, C. Yang, H. Xu, X. Li, and H. Cui Vacuum 77 2004 57 62
102. M.W. Zhu, J.H. Xia, R.J. Hong, H. Abu-Samra, H. Huang, T. Staedler, J. Gong, C. Sun, and X. Jiang J. Cryst. Growth 310 2008 816 823
103. S. Fujihara, C. Sasaki, and T. Kimura Appl. Surf. Sci. 180 2001 341 350
104. T. Nagase, T. Ooie, and J. Sakakibara Thin Solid Films 357 1999 151 158
105. P.T. Hsieh, Y.C. Chen, K.S. Kao, M.S. Lee, and C.C. Cheng J. Eur. Ceram. Soc. 27 2007 3815 3818
106. P.T. Hsieh, Y.C. Chen, M.S. Lee, K.S. Kao, M.C. Kao, and M.P. Houng J. Sol-Gel Sci. Technol. 47 2008 1 6
107. S.H. Yoon, D. Liu, D. Shen, M. Park, and D.J. Kim J. Mater. Sci. 43 2008 6177 6181
108. B.K. Choi, D.H. Chang, Y.S. Yoon, and S.J. Kang J. Mater. Sci.: Mater. Electron. 17 2006 1011 1015
109. G. Srinivasan, and J. Kumar Cryst. Res. Technol. 41 2006 893 896
110. G. Srinivasan, N. Gopalakrishnan, Y.S. Yu, R. Kesavamoorthy, and J. Kumar Superlattices Microstruct. 43 2008 112 119
111. G. Srinivasan, R.T. Rajendra Kumar, and J. Kumar J. Sol-Gel Sci. Technol. 43 2007 171 177
112. Y. Kokubun, H. Kimura, and S. Nakagomi Jpn. J. Appl. Phys. 42 2003 L904 L906
113. J.H. Lee, K.-H. Ko, and B.-O. Park J. Cryst. Growth 247 2003 119 125
114. S.W. Xue, X.T. Zu, L.X. Shao, Z.L. Yuan, W.G. Zheng, X.D. Jiang, and H. Deng J. Alloys Compd. 458 2008 569 573
115. R. Castanedo-Pérez, O. Jiménez-Sandoval, S. Jiménez-Sandoval, J. Márquez-Marín, A. Mendoza- Galván, G. Torres-Delgado, and A. Maldonado-Alvarez J. Vac. Sci. Technol. A 17 1999 1811 1816
116. G. Torres Delgado, C.I. Zúñiga Romero, S.A. Mayén Hernández, R. Castanedo-Pérez, and O. Zelaya Angel Sol. Energy Mater. Sol. Cells 93 2009 55 59
117. M.N. Kamalasanan, and S. Chandra Thin Solid Films 288 1996 112 115
118. A. Chatterjee, C.H. Shen, A. Ganguly, L.C. Chen, C.W. Hsu, J.Y. Hwang, and K.H. Chen Chem. Phys. Lett. 391 2004 278 282
119. M. Toyoda, J. Watanabe, and T. Matsumiya J. Sol-Gel Sci. Technol. 1-2 1999 93 99
120. T. Okamura, Y. Seki, S. Nagakari, and H. Okushi Jpn. J. Appl. Phys. 31 1992 3218 3220
121. M.S. Tokumoto, S.H. Pulcinelli, C.V. Santilli, and A.F. Craievich J. Non-Cryst. Solids 247 1999 176 182
122. L. Spanhel J. Sol-Gel Sci. Technol. 39 2006 7 24
123. R.D. Yang, S. Tripathy, Y. Li, and H.-J. Sue Chem. Phys. Lett. 411 2005 150 154
124. Y. Natsume, and H. Sakata Mater. Chem. Phys. 78 2002 170 176
125. N. Asakuma, H. Hirashima, H. Imai, T. Fukui, and M. Toki J. Sol-Gel Sci. Technol. 26 2003 181 184
126. S. Sakohara, L.D. Tickanen, and M.A. Anderson J. Phys. Chem. 96 1992 11086 11091
127. J.H. Guo, L. Vayssieres, C. Persson, R. Ahuja, B. Johansson, and J. Nordgren J. Phys.: Condens. Matter. 17 2005 235 240
128. W.J. Li, E.W. Shi, W.Z. Zhong, and Z.W. Yin J. Cryst. Growth 203 1999 186 196
129. L. Vayssieres, K. Keis, A. Hagfeldt, and S.-E. Lindquist Chem. Mater. 13 2001 4395 4398
130. K. Nishio, S. Miyake, T. Sei, Y. Watanabe, and T. Tsuchia J. Mater. Sci. 31 1996 3651 3656
131. T. Yoshida, M. Tochimoto, D. Schlettwein, D. Wöhrle, T. Sugiura, and H. Minoura Chem. Mater. 11 1999 2657 2667
132. M.H. Habibi, and M.K. Sardashti J. Iran. Chem. Soc. 5 2008 603 609
133. L. Znaidi, S. Benyahia, C. Marchand, J.P. Gaston, J. Kurdi, and J.F. Guillemoles Nineteenth European Photovoltaic Solar Energy Conference Proceedings of the international Conference held in Paris France, 7-11 June 2004 301 304
134. M.H. Habibi, and M.K. Sardashti J. Nanomater. 2008 1 5
135. C. Lu, J.Y. Cho, H.J. Chang, S.W. Joo, and Y. Wang Mater. Sci. Forum 449-452 2004 1009 1012