Effect of preheating and annealing temperatures on quality characteristics of ZnO thin film prepared by sol-gel method

Materials Chemistry and Physics

Volumn 97, Issue 2-3, 2006, Pages 219-225

  Wang, Minrui ^a   Wang, Jing ^a   Chen, Wen ^a   Cui, Yan ^a   Wang, Liding ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Annealing temperature; c Axis orientation; Preheating temperature; Residual stress; Resistance; ZnO thin film

Indexed keywords

ANNEALING; GRAIN SIZE AND SHAPE; PIEZOELECTRIC MATERIALS; SOL-GELS; THERMAL EFFECTS; ZINC OXIDE;

ANNEALING TEMPERATURE; C-AXIS ORIENTATION; PREHEATING TEMPERATURE; ZNO THIN FILM;

THIN FILMS;

EID: 33645894990     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchemphys.2005.07.072     Document Type: Article

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