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Materials Science and Engineering: B

Volumn 97, Issue 1, 2003, Pages 68-73

Structural properties of zinc oxide thin films prepared by r.f. magnetron sputtering

(5) Ondo Ndong, R a Pascal Delannoy, F a Boyer, A a Giani, A a Foucaran, A a

a UNIV MONTPELLIER (France)

Author keywords

Piezoelectric; RF sputtering magnetron; X ray diffraction; ZnO

Indexed keywords

ELECTRIC CONDUCTIVITY; FILM PREPARATION; GLASS; MAGNETRON SPUTTERING; OXYGEN; SAPPHIRE; SUBSTRATES; ZINC OXIDE;

STRUCTURAL PROPERTIES;

THIN FILMS;

EID: 0037437774 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-5107(02)00406-3 Document Type: Article

Times cited : (131)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.