An iterative-based feedforward-feedback control approach to high-speed atomic force microscope imaging

Journal of Dynamic Systems, Measurement and Control, Transactions of the ASME

Volumn 131, Issue 6, 2009, Pages 1-9

  Wu, Ying ^a   Zou, Qingze ^a  

^a Iowa State University of Science and Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; ATOMIC FORCE MICROSCOPES; AXIS CONTROL; CONTROL APPROACH; CONVERGENCE ANALYSIS; FEEDFORWARD-FEEDBACK CONTROL; HIGH-SPEED; OUTPUT-TRACKING; PERFORMANCE IMPROVEMENTS; PRECISION POSITIONING; PRECISION TRACKING; SAMPLE PROFILES; SCANLINE; SUCCESSIVE ITERATION; TRACKING ERRORS;

ATOMIC FORCE MICROSCOPY; FEEDBACK CONTROL; PRODUCTION PLATFORMS; SPEED; TRAJECTORIES;

TWO TERM CONTROL SYSTEMS;

EID: 77955908579     PISSN: 00220434     EISSN: 15289028     Source Type: Journal    
DOI: 10.1115/1.4000137     Document Type: Article

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