Robust inversion-based 2-DOF control design for output tracking: Piezoelectric-actuator example

IEEE Transactions on Control Systems Technology

Volumn 17, Issue 5, 2009, Pages 1069-1082

  Wu, Ying ^a   Zou, Qingze ^a  

^a Iowa State University of Science and Technology   (United States)

Author keywords

2 DOF control; Atomic force microscope (AFM); Inversion based feedforward control; Piezoelectric materials; Robust control

Indexed keywords

2-DOF CONTROL; ADVERSE EFFECT; ATOMIC FORCE MICROSCOPE (AFM); ATOMIC FORCE MICROSCOPES; CONTROL APPROACH; CONTROL DESIGN; DYNAMICS UNCERTAINTIES; EXISTING SYSTEMS; FEED-FORWARD CONTROLLERS; FEEDBACK CONTROLLER; INVERSION METHODS; INVERSION-BASED FEEDFORWARD CONTROL; OUTPUT-TRACKING; PRECISION POSITIONING; ROBUST SYSTEMS; SYSTEMATIC INTEGRATION; TRACKING ERRORS; TRACKING PERFORMANCE; UNCERTAINTY EFFECTS;

ACTUATORS; ATOMIC FORCE MICROSCOPY; CONTROLLERS; FEEDBACK CONTROL; FEEDFORWARD CONTROL; MEMS; MICROSCOPES; NONLINEAR CONTROL SYSTEMS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; ROBUST CONTROL;

FEEDBACK;

EID: 70049087315     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCST.2008.2005111     Document Type: Article

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