Wear of the AFM diamond tip sliding against silicon

Wear

Volumn 203-204, Issue , 1997, Pages 22-27

  Khurshudov, Andrei G ^a   Kato, Koji ^b   Koide, Hiroyuki ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

AFM; AFM tip wear; Diamond tip; Nano wear

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTALLINE MATERIALS; HARDNESS; INTERFACES (MATERIALS); NANOSTRUCTURED MATERIALS; SILICON; SINGLE CRYSTALS; STRESSES; WEAR OF MATERIALS; WEAR RESISTANCE;

DIAMOND TIP;

DIAMONDS;

DIAMONDS; MICROSCOPIC EXAMINATION; SILICON; WEAR;

EID: 0031103317     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0043-1648(96)07447-9     Document Type: Article

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