메뉴 건너뛰기




Volumn 157, Issue 9, 2010, Pages

Simulation of the effect of additives on electrochemical nucleation

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMICAL NUCLEATION; ELECTRODEPOSITION PROCESS; GROWTH OF PARTICLES; KEY PARAMETERS; METALLIC PARTICLES; MULTIPLE PARAMETERS; NUCLEATION STAGES; NUMERICAL RESULTS; NUMERICAL SIMULATION; PEAK CURRENT DENSITY; PROGRESSIVE NUCLEATION;

EID: 77955835659     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3457433     Document Type: Article
Times cited : (9)

References (42)
  • 1
    • 0942267575 scopus 로고    scopus 로고
    • JVTBD9 1071-1023,. 10.1116/1.1622676
    • H. Kim, J. Vac. Sci. Technol. B JVTBD9 1071-1023, 21, 2231 (2003). 10.1116/1.1622676
    • (2003) J. Vac. Sci. Technol. B , vol.21 , pp. 2231
    • Kim, H.1
  • 4
    • 33645136552 scopus 로고    scopus 로고
    • ELCAAV 0013-4686,. 10.1016/j.electacta.2005.08.043
    • J. Kelber, S. Rudenja, and C. Bjelkevig, Electrochim. Acta ELCAAV 0013-4686, 51, 3086 (2006). 10.1016/j.electacta.2005.08.043
    • (2006) Electrochim. Acta , vol.51 , pp. 3086
    • Kelber, J.1    Rudenja, S.2    Bjelkevig, C.3
  • 12
    • 40849113283 scopus 로고    scopus 로고
    • The oxide electrochemistry of ruthenium and its relevance to trench liner applications in damascene copper plating
    • DOI 10.1007/s10800-007-9449-3
    • L. D. Burke, N. S. Naser, and R. Sharna, J. Appl. Electrochem. JAELBJ 0021-891X, 38, 377 (2008). 10.1007/s10800-007-9449-3 (Pubitemid 351399845)
    • (2008) Journal of Applied Electrochemistry , vol.38 , Issue.3 , pp. 377-384
    • Burke, L.D.1    Naser, N.S.2    Sharna, R.3
  • 14
  • 15
    • 34249900173 scopus 로고    scopus 로고
    • Electrochemical nucleation and growth of copper from acidic sulfate electrolytes on n-Si(001)
    • DOI 10.1149/1.2733813
    • W. Shao, G. Pattanaik, and G. Zangari, J. Electrochem. Soc. JESOAN 0013-4651, 154, D339 (2007). 10.1149/1.2733813 (Pubitemid 46872250)
    • (2007) Journal of the Electrochemical Society , vol.154 , Issue.7
    • Shao, W.1    Pattanaik, G.2    Zangari, G.3
  • 16
    • 53649103676 scopus 로고    scopus 로고
    • ELCAAV 0013-4686,. 10.1016/j.electacta.2008.06.055
    • O. Gladysz and P. Los, Electrochim. Acta ELCAAV 0013-4686, 54, 801 (2008). 10.1016/j.electacta.2008.06.055
    • (2008) Electrochim. Acta , vol.54 , pp. 801
    • Gladysz, O.1    Los, P.2
  • 17
    • 33846458248 scopus 로고    scopus 로고
    • Nucleation and growth of copper on glassy carbon: Studies in extended overpotential interval
    • DOI 10.1016/j.jelechem.2006.10.002, PII S0022072806005699
    • T. Zapryanova, A. Hrussanova, and A. Milchev, J. Electroanal. Chem. JECHES 0022-0728, 600, 311 (2007). 10.1016/j.jelechem.2006.10.002 (Pubitemid 46148934)
    • (2007) Journal of Electroanalytical Chemistry , vol.600 , Issue.2 , pp. 311-317
    • Zapryanova, T.1    Hrussanova, A.2    Milchev, A.3
  • 18
    • 0037130328 scopus 로고    scopus 로고
    • Electrodeposition of copper: The nucleation mechanisms
    • DOI 10.1016/S0013-4686(02)00161-5, PII S0013468602001615
    • D. Grujicic and B. Pesic, Electrochim. Acta ELCAAV 0013-4686, 47, 2901 (2002). 10.1016/S0013-4686(02)00161-5 (Pubitemid 34704357)
    • (2002) Electrochimica Acta , vol.47 , Issue.18 , pp. 2901-2912
    • Grujicic, D.1    Pesic, B.2
  • 19
    • 10944220200 scopus 로고    scopus 로고
    • A time-dependent transport-kinetics model for additive interactions in copper interconnect metallization
    • DOI 10.1149/1.1799431
    • R. Akolkar and U. Landau, J. Electrochem. Soc. JESOAN 0013-4651, 151, C702 (2004). 10.1149/1.1799431 (Pubitemid 40010148)
    • (2004) Journal of the Electrochemical Society , vol.151 , Issue.11
    • Akolkar, R.1    Landau, U.2
  • 21
    • 0032187190 scopus 로고    scopus 로고
    • JESOAN 0013-4651,. 10.1149/1.1838830
    • J. J. Kelly and A. C. West, J. Electrochem. Soc. JESOAN 0013-4651, 145, 3477 (1998). 10.1149/1.1838830
    • (1998) J. Electrochem. Soc. , vol.145 , pp. 3477
    • Kelly, J.J.1    West, A.C.2
  • 22
    • 33748426349 scopus 로고    scopus 로고
    • Microfluidic studies of adsorption and desorption of polyethylene glycol during copper electrodeposition
    • DOI 10.1149/1.2335587
    • M. J. Willey and A. C. West, J. Electrochem. Soc. JESOAN 0013-4651, 153, C728 (2006). 10.1149/1.2335587 (Pubitemid 44343852)
    • (2006) Journal of the Electrochemical Society , vol.153 , Issue.10
    • Willey, M.J.1    West, A.C.2
  • 25
    • 77951194809 scopus 로고    scopus 로고
    • JESOAN 0013-4651,. 10.1149/1.3327902
    • U. Emekli and A. C. West, J. Electrochem. Soc. JESOAN 0013-4651, 157, D257 (2010). 10.1149/1.3327902
    • (2010) J. Electrochem. Soc. , vol.157 , pp. 257
    • Emekli, U.1    West, A.C.2
  • 28
    • 0031235856 scopus 로고    scopus 로고
    • JESOAN 0013-4651,. 10.1149/1.1837957
    • C. -C. Cheng and A. C. West, J. Electrochem. Soc. JESOAN 0013-4651, 144, 3050 (1997). 10.1149/1.1837957
    • (1997) J. Electrochem. Soc. , vol.144 , pp. 3050
    • Cheng, C.-C.1    West, A.C.2
  • 30
    • 0025401554 scopus 로고
    • JESOAN 0013-4651,. 10.1149/1.2086563
    • D. Roha and U. Landau, J. Electrochem. Soc. JESOAN 0013-4651, 137, 824 (1990). 10.1149/1.2086563
    • (1990) J. Electrochem. Soc. , vol.137 , pp. 824
    • Roha, D.1    Landau, U.2
  • 31
  • 33
    • 0026156519 scopus 로고
    • JESOAN 0013-4651,. 10.1149/1.2085768
    • K. G. Jordan and C. W. Tobias, J. Electrochem. Soc. JESOAN 0013-4651, 138, 1251 (1991). 10.1149/1.2085768
    • (1991) J. Electrochem. Soc. , vol.138 , pp. 1251
    • Jordan, K.G.1    Tobias, C.W.2
  • 36
    • 30544441919 scopus 로고    scopus 로고
    • Kinetic Monte Carlo simulations of nucleation and growth in electrodeposition
    • DOI 10.1021/jp055077u
    • L. Guo, A. Radisic, and P. C. Searson, J. Phys. Chem. B JPCBFK 1089-5647, 109, 24008 (2005). 10.1021/jp055077u (Pubitemid 43081451)
    • (2005) Journal of Physical Chemistry B , vol.109 , Issue.50 , pp. 24008-24015
    • Guo, L.1    Radisic, A.2    Searson, P.C.3
  • 37
    • 0038009183 scopus 로고    scopus 로고
    • JECHES 0022-0728,. 10.1016/S0022-0728(03)00250-X
    • M. E. Hyde and R. G. Compton, J. Electroanal. Chem. JECHES 0022-0728, 549, 1 (2003). 10.1016/S0022-0728(03)00250-X
    • (2003) J. Electroanal. Chem. , vol.549 , pp. 1
    • Hyde, M.E.1    Compton, R.G.2
  • 38
    • 0000025716 scopus 로고    scopus 로고
    • Direct Numerical Simulation of Nucleation and Three-Dimensional, Diffusion-Controlled Growth
    • DOI 10.1149/1.1365144
    • Y. Cao, P. C. Searson, and A. C. West, J. Electrochem. Soc. JESOAN 0013-4651, 148, C376 (2001). 10.1149/1.1365144 (Pubitemid 33693533)
    • (2001) Journal of the Electrochemical Society , vol.148 , Issue.5
    • Cao, Y.1    Searson, P.C.2    West, A.C.3
  • 39
    • 0036530371 scopus 로고    scopus 로고
    • Nucleation and three-dimensional growth: Deviation from diffusion control
    • DOI 10.1149/1.1461379
    • Y. Cao and A. C. West, J. Electrochem. Soc. JESOAN 0013-4651, 149, C223 (2002). 10.1149/1.1461379 (Pubitemid 34537140)
    • (2002) Journal of the Electrochemical Society , vol.149 , Issue.4
    • Cao, Y.1    West, A.C.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.