SCOPUS 정보 검색 플랫폼

Journal of the Electrochemical Society

Volumn 151, Issue 11, 2004, Pages

A time-dependent transport-kinetics model for additive interactions in copper interconnect metallization

(2) Akolkar, Rohan a Landau, Uziel a

a Case Western Reserve University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSIS; COPPER; CURRENT DENSITY; ELECTRODEPOSITION; ELECTRODES; ELECTROLYTES; POLARIZATION; POLYETHYLENE GLYCOLS; REACTION KINETICS; SECONDARY ION MASS SPECTROMETRY;

DAMASCENE; REFERENCE ELECTRODES; SIDEWALLS; TRANSIENT EFFECTS;

METALLIZING;

EID: 10944220200 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1799431 Document Type: Article

Times cited : (148)

References (14)

1
- 0032166781
- P. C. Andricacos, C. Uzoh, J. O. Dukovic, I. Horkans, and H. Deligianni, IBM J. Res. Dev., 42, 567 (1998).
- (1998) IBM J. Res. Dev. , vol.42 , pp. 567
- Andricacos, P.C.¹ Uzoh, C.² Dukovic, J.O.³ Horkans, I.⁴ Deligianni, H.⁵

2
- 0032187190
- J. J. Kelly and A. C. West, J. Electrochem. Soc., 145, 3477 (1998).
- (1998) J. Electrochem. Soc. , vol.145 , pp. 3477
- Kelly, J.J.¹ West, A.C.²

3
- 0000363887
- Y. Cao, P. Taephaisitphongie, R. Chalupa, and A. C. West, J. Electrochem. Soc., 148, C466 (2001).
- (2001) J. Electrochem. Soc. , vol.148
- Cao, Y.¹ Taephaisitphongie, P.² Chalupa, R.³ West, A.C.⁴

4
- 0036961827
- D. Josell, B. Baker, C. Witt, D. Wheeler, and T. P. Moffat, J. Electrochem. Soc., 149, C637 (2002).
- (2002) J. Electrochem. Soc. , vol.149
- Josell, D.¹ Baker, B.² Witt, C.³ Wheeler, D.⁴ Moffat, T.P.⁵

5
- 0000873250
- K. R. Hebert, J. Electrochem. Soc., 148, C726 (2001).
- (2001) J. Electrochem. Soc. , vol.148
- Hebert, K.R.¹

6
- 0037931966
- M. Kang and A. A. Gewirth, J. Electrochem. Soc., 150, C426 (2003).
- (2003) J. Electrochem. Soc. , vol.150
- Kang, M.¹ Gewirth, A.A.²

7
- 84975371400
- J. Newman, J. Electrochem. Soc., 113, 501 (1966).
- (1966) J. Electrochem. Soc. , vol.113 , pp. 501
- Newman, J.¹

8
- 0032186748
- I. J. Kelly and A. C. West, J. Electrochem. Soc., 145, 3472 (1998).
- (1998) J. Electrochem. Soc. , vol.145 , pp. 3472
- Kelly, I.J.¹ West, A.C.²

9
- 0003482665
- Prentice-Hall, Englewood Cliffs, NJ
- J. S. Newman, Electrochemical Systems, Prentice-Hall, Englewood Cliffs, NJ, 1973.
- (1973) Electrochemical Systems
- Newman, J.S.¹

10
- 10944274033
- Abstract 612, Paris, France, April 28-May 2
- U. Landau, R. Akolkar, M. Bubnick and J. D'Urao, Abstract 612, The Electrochemical Society and The International Society of Electrochemistry Meeting Abstracts, Vol. 2003-1, Paris, France, April 28-May 2, 2003.
- (2003) The Electrochemical Society and the International Society of Electrochemistry Meeting Abstracts , vol.2003 , Issue.1
- Landau, U.¹ Akolkar, R.² Bubnick, M.³ D'Urao, J.⁴

11
- 10944259146
- Paper 189 c, session TK, San Francisco, CA, Nov 16-21
- R. Akolkar and U. Landau, in Proceedings of the AIChE Annual Meeting, Paper 189 c, session TK, San Francisco, CA, Nov 16-21, 2003.
- (2003) Proceedings of the AIChE Annual Meeting
- Akolkar, R.¹ Landau, U.²

12
- 10944245702
- Warren, MI
- R. Akolkar, U. Landau, H. Kuo, and Yar-Ming Wang, General Motors Research Publication, Warren, MI (2003).
- (2003) General Motors Research Publication
- Akolkar, R.¹ Landau, U.² Kuo, H.³ Wang, Y.-M.⁴

13
- 10944259146
- Paper 189 d, session TK, San Francisco, CA, Nov 16-21
- U. Landau, E. Malyshev, R. Akolkar, and S. Chivilikhin, in Proceedings of the AIChE Annual Meeting, Paper 189 d, session TK, San Francisco, CA, Nov 16-21, 2003.
- (2003) Proceedings of the AIChE Annual Meeting
- Landau, U.¹ Malyshev, E.² Akolkar, R.³ Chivilikhin, S.⁴

14
- 10944240909
- R. Akolkar and U. Landau, In preparation
- R. Akolkar and U. Landau, In preparation.

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.