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Volumn 5, Issue 9, 2002, Pages

Seedless electrodeposition of Cu on unmodified tungsten

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; COPPER; CRYSTAL GROWTH; NUCLEATION; PH EFFECTS; POLYCRYSTALLINE MATERIALS; REACTION KINETICS; SCANNING ELECTRON MICROSCOPY; SULFURIC ACID; TUNGSTEN; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0036714841     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1498015     Document Type: Article
Times cited : (9)

References (10)
  • 1
    • 0005263961 scopus 로고    scopus 로고
    • Semiconductor Industry Association Roadmap, CA SIA, San Jose
    • (1999)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.