The oxide electrochemistry of ruthenium and its relevance to trench liner applications in damascene copper plating

Journal of Applied Electrochemistry

Volumn 38, Issue 3, 2008, Pages 377-384

  Burke, L D ^a   Naser, N S ^a   Sharna, R ^a  

^a UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

Copper; Electrodeposition; Interconnects; Ruthenium; Trench liner

Indexed keywords

ADHESION; COPPER PLATING; ELECTROCHEMISTRY; ELECTRODEPOSITION; OXIDES;

OXIDE ELECTROCHEMISTRY; TRENCH LINER;

RUTHENIUM COMPOUNDS;

EID: 40849113283     PISSN: 0021891X     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10800-007-9449-3     Document Type: Article

References (40)

1. Chyan O, Arunagiri TN, Ponnuswamy T (2003) J Electrochem Soc 150:C347
2. Zhang Y, Huang L, Arunagiri TN, Ojeda O, Flores S, Chyan O, Wallace RM (2004) Electrochem Solid-State Lett 7:C107
3. Chan R, Arunagiri TN, Zhang Y, Chyan O, Wallace RM, Kim MJ, Hurd TQ (2004) Electrochem Solid-State Lett 7:G154
4. Arunagiri TN, Zhang Y, Chyan O, Kim MJ, Hurd TQ (2005) J Electrochem Soc 152:G808
5. Kim H, Koseki T, Ohba T, Ohta T, Kojima Y, Sato H, Shimogaki Y (2005) J Electrochem Soc 152:G594
6. Zheng M, Willey M, West AC (2005) Electrochem Solid-State Lett 8:C151
7. Liu J, Lei J, Magtoto N, Rudenja S, Garza M, Kelber JA (2005) J Electrochem Soc 153:G115
8. Walker ML, Richter LJ, Josell D, Moffat TP (2006) J Electrochem Soc 153:C235
9. Moffat TP, Walker M, Chen PJ, Bonevich JE, Egelhoff WF, Richter L, Witt C, Aaltonen T, Ritala M, Leskelä M, Josell D (2006) J Electrochem Soc 153:C37
10. Damayanti M, Sritharan T, Gan ZH, Mhaisalkar SG, Jiang N, Chan L (2006) J Electrochem Soc 153:J41
11. Kim Y-S, Kim H-II, Dar MA, Seo H-K, Kim G-S, Ansari SG, Senkevich JJ, Shin H-S (2006) Electrochem Solid-State Lett 9:C19
12. Guo L, Radisic A, Searson PC (2006) J Electrochem Soc 153:C840
13. Dubin VM, Akolkar R, Cheng CC, Chebiam R, Fajardo A, Gstrein F (2007) Electrochim Acta 52:2891
14. Burke LD (2004) Gold Bull 37:125
15. Burke LD, O'Connell AM, Sharna R, Buckley CA (2006) J Appl Electrochem 36:919
16. Pourbaix M (1966) Atlas of electrochemical equilibria in aqueous solutions. Pergammon Press, Oxford
17. Tavares AC, Trasatti S (2000) Electrochim Acta 45:4195
18. Børresen B, Hagen G, Tunold R (2002) Electrochim Acta 47:1819
19. Rochefort D, Dabo P, Guay D, Sherwood PMA (2003) Electrochim Acta 48:4245
20. Burke LD, Naser NS (2005) J Appl Electrochem 35:931
21. Burke LD, Naser NS, Ahern BM (2007) J Solid State Electrochem 11:655
22. Burke LD, Hurley LM (1999) Electrochim Acta 44:3451
23. Woods R (1976) In: Bard AJ (ed) Electroanalytical chemistry, vol 9. Dekker, New York, pp 1-162
24. Mitchell D, Rand DAJ, Woods R (1978) J Electroanal Chem 89:11
25. Hadži-Jordanov S, Angerstien-Kozlowska H, Conway BE (1975) J Electroanal Chem 60:359
26. Hadži-Jordanov S, Angerstien-Kozlowska H, Vuković M, Conway BE (1977) J Phys Chem 81:2271
27. Hadži-Jordanov S, Angerstien-Kozlowska H, Vuković M, Conway BE (1978) J Electrochem Soc 125:1471
28. Vukovic M, Cukman D (1999) J Electroanal Chem 474:167
29. Hu C-C, Huang Y-H (2001) Electrochim Acta 46:3431
30. Ardizzone S, Fregonara G, Trasatti S (1989) J Electroanal Chem 266:191
31. Burke LD, Lyons MEG (1986) In: White RE, Bockris JO'M, Conway BE (eds) Modern aspects of electrochemistry, vol 18. Plenum Press, New York, pp 169-248
32. Liu T-C, Pell WG, Conway BE (1999) Electrochim Acta 44:2829
33. Burke LD, Healy JF (1981) J Electroanal Chem 124:327
34. Burke LD, Buckley DT (1994) J Electroanal Chem 366:239
35. Birss V, Myers R, Angerstein-Kozlowska H, Conway BE (1984) J Electrochem Soc 131:1502
36. Burke LD, Sharna R (2007) J Appl Electrochem 37:1119
37. Tourillon G, Guay D, Tadjeddine A (1990) J Electroanal Chem 289:263
38. Tadjeddine A, Tourillon G, Guay D (1991) Electrochim Acta 36:1859
39. Parry DB, Samant MG, Seki H, Philpott MR (1993) Langmuir 9:1878
40. Watanabe M, Uchida H, Ikeda N (1995) J Electroanal Chem 380:255