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Volumn 157, Issue 5, 2010, Pages

Electrochemical nucleation of copper: The effect of poly(ethylene glycol)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER ELECTRODEPOSITION; DISTRIBUTION OF PARTICLES; ELECTROCHEMICAL NUCLEATION; NUCLEATION RATE; NUCLEUS DENSITY; PEG CONCENTRATION; PROGRESSIVE NUCLEATION; SIMULATION RESULT;

EID: 77951194809     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3327902     Document Type: Article
Times cited : (16)

References (31)
  • 11
    • 0037130328 scopus 로고    scopus 로고
    • Electrodeposition of copper: The nucleation mechanisms
    • DOI 10.1016/S0013-4686(02)00161-5, PII S0013468602001615
    • D. Grujicic and B. Pesic, Electrochim. Acta 0013-4686, 47, 2901 (2002). 10.1016/S0013-4686(02)00161-5 (Pubitemid 34704357)
    • (2002) Electrochimica Acta , vol.47 , Issue.18 , pp. 2901-2912
    • Grujicic, D.1    Pesic, B.2
  • 12
    • 30544441919 scopus 로고    scopus 로고
    • Kinetic Monte Carlo simulations of nucleation and growth in electrodeposition
    • DOI 10.1021/jp055077u
    • L. Guo, A. Radisic, and P. C. Searson, J. Phys. Chem. B 1089-5647, 109, 24008 (2005). 10.1021/jp055077u (Pubitemid 43081451)
    • (2005) Journal of Physical Chemistry B , vol.109 , Issue.50 , pp. 24008-24015
    • Guo, L.1    Radisic, A.2    Searson, P.C.3
  • 13
    • 57749098688 scopus 로고    scopus 로고
    • 0013-4686. 10.1016/j.electacta.2008.08.065
    • U. Emekli and A. C. West, Electrochim. Acta 0013-4686, 54, 1177 (2009). 10.1016/j.electacta.2008.08.065
    • (2009) Electrochim. Acta , vol.54 , pp. 1177
    • Emekli, U.1    West, A.C.2
  • 18
    • 0036476026 scopus 로고    scopus 로고
    • Influence of additives on nucleation and growth of copper on n-Si(111) from acidic sulfate solutions
    • DOI 10.1149/1.1430719
    • A. Radisic, A. C. West, and P. C. Searson, J. Electrochem. Soc. 0013-4651, 149, C94 (2002). 10.1149/1.1430719 (Pubitemid 34307188)
    • (2002) Journal of the Electrochemical Society , vol.149 , Issue.2
    • Radisic, A.1    West, A.C.2    Searson, P.C.3
  • 19
    • 40849113283 scopus 로고    scopus 로고
    • The oxide electrochemistry of ruthenium and its relevance to trench liner applications in damascene copper plating
    • DOI 10.1007/s10800-007-9449-3
    • L. Burke, N. Naser, and R. Sharna, J. Appl. Electrochem. 0021-891X, 38, 377 (2008). 10.1007/s10800-007-9449-3 (Pubitemid 351399845)
    • (2008) Journal of Applied Electrochemistry , vol.38 , Issue.3 , pp. 377-384
    • Burke, L.D.1    Naser, N.S.2    Sharna, R.3
  • 23
    • 0020150419 scopus 로고
    • 0013-4686. 10.1016/0013-4686(83)85163-9
    • B. Scharifker and G. Hills, Electrochim. Acta 0013-4686, 28, 879 (1983). 10.1016/0013-4686(83)85163-9
    • (1983) Electrochim. Acta , vol.28 , pp. 879
    • Scharifker, B.1    Hills, G.2
  • 25
    • 0000025716 scopus 로고    scopus 로고
    • Direct numerical simulation of nucleation and three-dimensional, diffusion-controlled growth
    • DOI 10.1149/1.1365144
    • Y. Cao, P. C. Searson, and A. C. West, J. Electrochem. Soc. 0013-4651, 148, C376 (2001). 10.1149/1.1365144 (Pubitemid 33693533)
    • (2001) Journal of the Electrochemical Society , vol.148 , Issue.5
    • Cao, Y.1    Searson, P.C.2    West, A.C.3
  • 26
    • 0035900160 scopus 로고    scopus 로고
    • Direct numerical simulation of nucleation and three-dimensional, diffusion-controlled growth on disk microelectrodes
    • DOI 10.1016/S0022-0728(01)00625-8, PII S0022072801006258
    • Y. Cao and A. C. West, J. Electroanal. Chem. 0022-0728, 514, 103 (2001). 10.1016/S0022-0728(01)00625-8 (Pubitemid 33034409)
    • (2001) Journal of Electroanalytical Chemistry , vol.514 , Issue.1-2 , pp. 103-108
    • Cao, Y.1    West, A.C.2
  • 27
    • 33748426349 scopus 로고    scopus 로고
    • Microfluidic studies of adsorption and desorption of polyethylene glycol during copper electrodeposition
    • DOI 10.1149/1.2335587
    • M. J. Willey and A. C. West, J. Electrochem. Soc. 0013-4651, 153, C728 (2006). 10.1149/1.2335587 (Pubitemid 44343852)
    • (2006) Journal of the Electrochemical Society , vol.153 , Issue.10
    • Willey, M.J.1    West, A.C.2
  • 31


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