-
1
-
-
14744301185
-
Direct copper electroless deposition on a tungsten barrier Layer for ultralarge scale integration
-
DOI 10.1149/1.1850377
-
Y. -s. Kim, D. -l. Bae, H. Yang, H. -s. Shin, G. -W. Wang, J. J. Senkevich, and T. -M. Lu, J. Electrochem. Soc. 0013-4651, 152, C89 (2005). 10.1149/1.1850377 (Pubitemid 40328992)
-
(2005)
Journal of the Electrochemical Society
, vol.152
, Issue.2
-
-
Kim, Y.-S.1
Bae, D.-I.2
Yang, H.3
Shin, H.-S.4
Wang, G.-W.5
Senkevich, J.J.6
Lu, T.-M.7
-
2
-
-
33746025914
-
Electrochemical deposition of copper and ruthenium on titanium
-
DOI 10.1016/j.electacta.2006.02.016, PII S0013468606001587
-
Y. -S. Kim, H. -I. Kim, J. -H. Cho, H. -K. Seo, G. -S. Kim, S. G. Ansari, G. Khang, J. J. Senkevich, and H. -S. Shin, Electrochim. Acta 0013-4686, 51, 5445 (2006). 10.1016/j.electacta.2006.02.016 (Pubitemid 44066348)
-
(2006)
Electrochimica Acta
, vol.51
, Issue.25
, pp. 5445-5451
-
-
Kim, Y.-S.1
Kim, H.-I.2
Cho, J.-H.3
Seo, H.-K.4
Kim, G.-S.5
Ansari, S.G.6
Khang, G.7
Senkevich, J.J.8
Shin, H.-S.9
-
3
-
-
25644444031
-
-, PEG, and SPS
-
DOI 10.1149/1.2035701
-
M. Zheng, M. Willey, and A. C. West, Electrochem. Solid-State Lett. 1099-0062, 8, C151 (2005). 10.1149/1.2035701 (Pubitemid 41384208)
-
(2005)
Electrochemical and Solid-State Letters
, vol.8
, Issue.10
-
-
Zheng, M.1
Willey, M.2
West, A.C.3
-
4
-
-
0242366729
-
-
0040-6090. 10.1016/S0040-6090(03)01239-2
-
C. Wang, J. Lei, C. Bjelkevig, S. Rudenja, N. Magtoto, and J. Kelber, Thin Solid Films 0040-6090, 445, 72 (2003). 10.1016/S0040-6090(03)01239-2
-
(2003)
Thin Solid Films
, vol.445
, pp. 72
-
-
Wang, C.1
Lei, J.2
Bjelkevig, C.3
Rudenja, S.4
Magtoto, N.5
Kelber, J.6
-
5
-
-
33750795318
-
Electrodeposition of copper on oxidized ruthenium
-
DOI 10.1149/1.2354454, 026612JES
-
L. Guo, A. Radisic, and P. C. Searson, J. Electrochem. Soc. 0013-4651, 153, C840 (2006). 10.1149/1.2354454 (Pubitemid 44711546)
-
(2006)
Journal of the Electrochemical Society
, vol.153
, Issue.12
-
-
Guo, L.1
Radisic, A.2
Searson, P.C.3
-
6
-
-
33645136552
-
-
0013-4686. 10.1016/j.electacta.2005.08.043
-
J. Kelber, S. Rudenja, and C. Bjelkevig, Electrochim. Acta 0013-4686, 51, 3086 (2006). 10.1016/j.electacta.2005.08.043
-
(2006)
Electrochim. Acta
, vol.51
, pp. 3086
-
-
Kelber, J.1
Rudenja, S.2
Bjelkevig, C.3
-
7
-
-
0038516975
-
-
0013-4651. 10.1149/1.1565138
-
O. Chyan, T. N. Arunagiri, and T. Ponnuswamy, J. Electrochem. Soc. 0013-4651, 150, C347 (2003). 10.1149/1.1565138
-
(2003)
J. Electrochem. Soc.
, vol.150
, pp. 347
-
-
Chyan, O.1
Arunagiri, T.N.2
Ponnuswamy, T.3
-
8
-
-
33644803500
-
-
0013-4651. 10.1149/1.2131826
-
T. P. Moffat, M. Walker, P. J. Chen, J. E. Bonevich, W. F. Egelhoff, L. Richter, C. Witt, T. Aaltonen, M. Ritala, M. Leskela, J. Electrochem. Soc. 0013-4651, 153, C37 (2006). 10.1149/1.2131826
-
(2006)
J. Electrochem. Soc.
, vol.153
, pp. 37
-
-
Moffat, T.P.1
Walker, M.2
Chen, P.J.3
Bonevich, J.E.4
Egelhoff, W.F.5
Richter, L.6
Witt, C.7
Aaltonen, T.8
Ritala, M.9
Leskela, M.10
-
9
-
-
0035126760
-
Nucleation and growth of copper on TiN from pyrophosphate solution
-
DOI 10.1149/1.1344539
-
A. Radisic, J. G. Long, P. M. Hoffmann, and P. C. Searson, J. Electrochem. Soc. 0013-4651, 148, C41 (2001). 10.1149/1.1344539 (Pubitemid 32189339)
-
(2001)
Journal of the Electrochemical Society
, vol.148
, Issue.1
-
-
Radisic, A.1
Long, J.G.2
Hoffmann, P.M.3
Searson, P.C.4
-
10
-
-
0036714841
-
Seedless electrodeposition of Cu on unmodified tungsten
-
DOI 10.1149/1.1498015
-
C. Wang, J. Lei, S. Rudenja, N. Magtoto, and J. Kelber, Electrochem. Solid-State Lett. 1099-0062, 5, C82 (2002). 10.1149/1.1498015 (Pubitemid 35010012)
-
(2002)
Electrochemical and Solid-State Letters
, vol.5
, Issue.9
-
-
Wang, C.1
Lei, J.2
Rudenja, S.3
Magtoto, N.4
Kelber, J.5
-
11
-
-
0037130328
-
Electrodeposition of copper: The nucleation mechanisms
-
DOI 10.1016/S0013-4686(02)00161-5, PII S0013468602001615
-
D. Grujicic and B. Pesic, Electrochim. Acta 0013-4686, 47, 2901 (2002). 10.1016/S0013-4686(02)00161-5 (Pubitemid 34704357)
-
(2002)
Electrochimica Acta
, vol.47
, Issue.18
, pp. 2901-2912
-
-
Grujicic, D.1
Pesic, B.2
-
12
-
-
30544441919
-
Kinetic Monte Carlo simulations of nucleation and growth in electrodeposition
-
DOI 10.1021/jp055077u
-
L. Guo, A. Radisic, and P. C. Searson, J. Phys. Chem. B 1089-5647, 109, 24008 (2005). 10.1021/jp055077u (Pubitemid 43081451)
-
(2005)
Journal of Physical Chemistry B
, vol.109
, Issue.50
, pp. 24008-24015
-
-
Guo, L.1
Radisic, A.2
Searson, P.C.3
-
13
-
-
57749098688
-
-
0013-4686. 10.1016/j.electacta.2008.08.065
-
U. Emekli and A. C. West, Electrochim. Acta 0013-4686, 54, 1177 (2009). 10.1016/j.electacta.2008.08.065
-
(2009)
Electrochim. Acta
, vol.54
, pp. 1177
-
-
Emekli, U.1
West, A.C.2
-
14
-
-
0032166781
-
-
0018-8646
-
P. C. Andricacos, C. Uzoh, J. O. Dukovic, J. Horkans, and H. Deligianni, IBM J. Res. Dev. 0018-8646, 42, 567 (1998).
-
(1998)
IBM J. Res. Dev.
, vol.42
, pp. 567
-
-
Andricacos, P.C.1
Uzoh, C.2
Dukovic, J.O.3
Horkans, J.4
Deligianni, H.5
-
15
-
-
0000363887
-
Three-additive model of superfilling of copper
-
DOI 10.1149/1.1377898
-
Y. Cao, P. Taephaisitphongse, R. Chalupa, and A. C. West, J. Electrochem. Soc. 0013-4651, 148, C466 (2001). 10.1149/1.1377898 (Pubitemid 33694794)
-
(2001)
Journal of the Electrochemical Society
, vol.148
, Issue.7
-
-
Cao, Y.1
Taephaisitphongse, P.2
Chalupa, R.3
West, A.C.4
-
16
-
-
13844256568
-
-
0018-8646
-
P. M. Vereecken, R. A. Binstead, H. Deligianni, and P. C. Andricacos, IBM J. Res. Dev. 0018-8646, 49, 3 (2005).
-
(2005)
IBM J. Res. Dev.
, vol.49
, pp. 3
-
-
Vereecken, P.M.1
Binstead, R.A.2
Deligianni, H.3
Andricacos, P.C.4
-
17
-
-
0035412296
-
-
1099-0062. 10.1149/1.1375856
-
A. C. West, S. Mayer, and J. Reid, Electrochem. Solid-State Lett. 1099-0062, 4, C50 (2001). 10.1149/1.1375856
-
(2001)
Electrochem. Solid-State Lett.
, vol.4
, pp. 50
-
-
West, A.C.1
Mayer, S.2
Reid, J.3
-
18
-
-
0036476026
-
Influence of additives on nucleation and growth of copper on n-Si(111) from acidic sulfate solutions
-
DOI 10.1149/1.1430719
-
A. Radisic, A. C. West, and P. C. Searson, J. Electrochem. Soc. 0013-4651, 149, C94 (2002). 10.1149/1.1430719 (Pubitemid 34307188)
-
(2002)
Journal of the Electrochemical Society
, vol.149
, Issue.2
-
-
Radisic, A.1
West, A.C.2
Searson, P.C.3
-
19
-
-
40849113283
-
The oxide electrochemistry of ruthenium and its relevance to trench liner applications in damascene copper plating
-
DOI 10.1007/s10800-007-9449-3
-
L. Burke, N. Naser, and R. Sharna, J. Appl. Electrochem. 0021-891X, 38, 377 (2008). 10.1007/s10800-007-9449-3 (Pubitemid 351399845)
-
(2008)
Journal of Applied Electrochemistry
, vol.38
, Issue.3
, pp. 377-384
-
-
Burke, L.D.1
Naser, N.S.2
Sharna, R.3
-
22
-
-
0002598083
-
-
0022-0728. 10.1016/0022-0728(87)88014-2
-
M. Sluyters-Rehbach, J. H. O. J. Wijenberg, E. Bosco, and J. H. Sluyters, J. Electroanal. Chem. Interfacial Electrochem. 0022-0728, 236, 1 (1987). 10.1016/0022-0728(87)88014-2
-
(1987)
J. Electroanal. Chem. Interfacial Electrochem.
, vol.236
, pp. 1
-
-
Sluyters-Rehbach, M.1
Wijenberg, J.H.O.J.2
Bosco, E.3
Sluyters, J.H.4
-
23
-
-
0020150419
-
-
0013-4686. 10.1016/0013-4686(83)85163-9
-
B. Scharifker and G. Hills, Electrochim. Acta 0013-4686, 28, 879 (1983). 10.1016/0013-4686(83)85163-9
-
(1983)
Electrochim. Acta
, vol.28
, pp. 879
-
-
Scharifker, B.1
Hills, G.2
-
24
-
-
0037502889
-
-
0013-4651. 10.1149/1.1565137
-
A. Radisic, Y. Cao, P. Taephaisitphongse, A. C. West, and P. C. Searson, J. Electrochem. Soc. 0013-4651, 150, C362 (2003). 10.1149/1.1565137
-
(2003)
J. Electrochem. Soc.
, vol.150
, pp. 362
-
-
Radisic, A.1
Cao, Y.2
Taephaisitphongse, P.3
West, A.C.4
Searson, P.C.5
-
25
-
-
0000025716
-
Direct numerical simulation of nucleation and three-dimensional, diffusion-controlled growth
-
DOI 10.1149/1.1365144
-
Y. Cao, P. C. Searson, and A. C. West, J. Electrochem. Soc. 0013-4651, 148, C376 (2001). 10.1149/1.1365144 (Pubitemid 33693533)
-
(2001)
Journal of the Electrochemical Society
, vol.148
, Issue.5
-
-
Cao, Y.1
Searson, P.C.2
West, A.C.3
-
26
-
-
0035900160
-
Direct numerical simulation of nucleation and three-dimensional, diffusion-controlled growth on disk microelectrodes
-
DOI 10.1016/S0022-0728(01)00625-8, PII S0022072801006258
-
Y. Cao and A. C. West, J. Electroanal. Chem. 0022-0728, 514, 103 (2001). 10.1016/S0022-0728(01)00625-8 (Pubitemid 33034409)
-
(2001)
Journal of Electroanalytical Chemistry
, vol.514
, Issue.1-2
, pp. 103-108
-
-
Cao, Y.1
West, A.C.2
-
27
-
-
33748426349
-
Microfluidic studies of adsorption and desorption of polyethylene glycol during copper electrodeposition
-
DOI 10.1149/1.2335587
-
M. J. Willey and A. C. West, J. Electrochem. Soc. 0013-4651, 153, C728 (2006). 10.1149/1.2335587 (Pubitemid 44343852)
-
(2006)
Journal of the Electrochemical Society
, vol.153
, Issue.10
-
-
Willey, M.J.1
West, A.C.2
-
28
-
-
0003591312
-
-
E. Budevski, G. Staikov, and W. J. Lorenz, Electrochemical Phase Formation and Growth, p. 409, VCH, New York (1997).
-
(1997)
Electrochemical Phase Formation and Growth
, pp. 409
-
-
Budevski, E.1
Staikov, G.2
Lorenz, W.J.3
-
29
-
-
70349514804
-
-
0013-4686. 10.1016/j.electacta.2009.08.045
-
N. Tantavichet, S. Damronglerd, and O. Chailapakul, Electrochim. Acta 0013-4686, 55, 240 (2009). 10.1016/j.electacta.2009.08.045
-
(2009)
Electrochim. Acta
, vol.55
, pp. 240
-
-
Tantavichet, N.1
Damronglerd, S.2
Chailapakul, O.3
-
30
-
-
0042530607
-
-
Vol., R. C. Alkire, Editor, Wiley-VCH, Weinheim, Germany
-
D. M. Kolb, in Advances in Electrochemical Science and Engineering, Vol. 7, R. C. Alkire, Editor, p. 107, Wiley-VCH, Weinheim, Germany (2001).
-
(2001)
Advances in Electrochemical Science and Engineering
, vol.7
, pp. 107
-
-
Kolb, D.M.1
|