Electrochemical nucleation of copper on ruthenium effect of Cl -, PEG, and SPS

Electrochemical and Solid-State Letters

Volumn 8, Issue 10, 2005, Pages

  Zheng, Min ^a   Willey, Mark ^a   West, Alan C ^a  

^a Columbia University ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADDITIVES; CURRENT DENSITY; ELECTROCHEMISTRY; ELECTRODEPOSITION; IONS; RUTHENIUM;

CHLORIDE IONS; COPPER ELECTRODEPOSITION; ELECTROCHEMICAL NUCLEATION; GALVANOSTATIC OPERATION;

NUCLEATION;

EID: 25644444031     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2035701     Document Type: Article

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