Electrons as "Invisible Ink": Fabrication of nanostructures by local electron beam induced activation of SiOx

Angewandte Chemie - International Edition

Volumn 49, Issue 27, 2010, Pages 4669-4673

  Walz, Marie Madeleine ^a   Schirmer, Michael ^a   Vollnhals, Florian ^a   Lukasczyk, Thomas ^a   Steinrück, Hans Peter ^a   Marbach, Hubertus ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

Crystal growth; Electron microscopy; Iron; Nanotechnology; Silicon oxide

Indexed keywords

INVISIBLE INK; TWO-STEP PROCESS;

CRYSTAL GROWTH; CRYSTALLIZATION; ELECTRON BEAMS; ELECTRONS; GRAIN BOUNDARIES; IRON COMPOUNDS; NANOCRYSTALS; NANOTECHNOLOGY; SCANNING ELECTRON MICROSCOPY; SILICON COMPOUNDS;

SILICON OXIDES;

EID: 77953918298     PISSN: 14337851     EISSN: 15213773     Source Type: Journal    
DOI: 10.1002/anie.201001308     Document Type: Article

References (39)

1. a) A. A. C. Papageorgiou, C. L. Pang, Q. Chen, G. Thornton, ACS Nano 2007, 1, 409;
2. b) A. Gölzhäuser, W. Eck, W. Geyer, V. Stadler, T. Weimann, P. Hinze, M. Grunze, Adv. Mater. 2001, 13, 803;
3. W. Eck, A. Kuller, M. Grunze, B. Volkel, A. Gölzhäuser, Adv. Mater. 2005, 17, 2583;
4. A. Turchanin, A. Beyer, C. T. Nottbohm, X. H. Zhang, R. Stosch, A. Sologubenko, J. Mayer, P. Hinze, T. Weimann, A. Gölzhäuser, Adv. Mater. 2009, 21, 1233;
5. e) T. Hamann, E. Bohler, P. Swiderek, Angew. Chem. 2009, 121, 4715;
6. Angew. Chem. Int. Ed. 2009, 48, 4643;
7. f) R. D. Ramsier, J. T. Yates, Surf. Sci. Rep. 1991, 12, 246.
8. a) W. F. van Dorp, C. W. Hagen, P. A. Crozier, P. Kruit, Nanotechnology 2008, 19, 225305;
9. b) S. Matsui, K. Mori, J. Vac. Sci. Technol. B 1986, 4, 299;
10. A. N. Broers, W. W. Molzen, J. J. Cuomo, N. D. Wittels, Appl. Phys. Lett. 1976, 29, 596;
11. H. W. P. Koops, R. Weiel, D. P. Kern, T. H. Baum, J. Vac. Sci. Technol. B 1988, 6, 477.
12. a) W. F. van Dorp, B. van Someren, C. W. Hagen, P. Kruit, Nano Lett. 2005, 5, 1303;
13. b) L. van Kouwen, A. Botman, C. W. Hagen, Nano Lett. 2009, 9, 2149.
14. S. J. Randolph, J. D. Fowlkes, P. D. Rack, Crit. Rev. Solid State Mater. Sci. 2006, 31, 55.
15. I. Utke, P. Hoffman, J. Melngailis, J. Vac. Sci. Technol. B 2008, 26, 1197.
16. W. F. van Dorp, C. W. Hagen, J. Appl. Phys. 2008, 104, 081301.
17. K. Edinger, H. Becht, J. Bihr, V. Boegli, M. Budach, T. Hofmann, H. W. P. Koops, P. Kuschnerus, J. Oster, P. Spies, B. Weyrauch, J. Vac. Sci. Technol. B 2004, 22, 2902.
18. a) I. Utke, P. Hoffmann, R. Berger, L. Scandella, Appl. Phys. Lett. 2002, 80, 4792;
19. b) A. Botman, J. J. L. Mulders, C. W. Hagen, Nanotechnology 2009, 20, 372001.
20. Y. M. Lau, P. C. Chee, J. T. L. Thong, V. Ng, J. Vac. Sci. Technol. A 2002, 20, 1295.
21. M. Steenackers, R. Jordan, A. Kuller, M. Grunze, Adv. Mater. 2009, 21, 2921.
22. T. Lukasczyk, M. Schirmer, H.-P. Steinrück, H. Marbach, Small 2008, 4, 841.
23. T. Lukasczyk, M. Schirmer, H.-P. Steinrück, H. Marbach, Langmuir 2009, 25, 11930.
24. O. Guise, H. Marbach, J. Levy, J. Ahner, J. T. Yates, Surf. Sci. 2004, 571, 128.
25. W. Zhang, M. Shimojo, M. Takeguchi, K. Furuya, J. Mater. Sci. 2006, 41, 2577.
26. A. F. Holleman, E. Wiberg, N. Wiberg, Holleman-Wiberg, Lehrbuch der Anorganischen Chemie, Vol. 101, Walter de Gruyter, Berlin, 1995.
27. L. Reimer, Scanning Electron Microscopy, Springer, Heidelberg, 1998.
28. Springer handbook of nanotechnology, (Ed. B. Bhushan), Springer, Berlin, 2006.
29. M. L. Knotek, P. J. Feibelman, Phys. Rev. Lett. 1978, 40, 964.
30. H. Niehus, W. Losch, Surf. Sci. 1981, 111, 344.
31. a) T. Block, H. Pfnür, J. Appl. Phys. 2008, 103, 064303;
32. b) H. Pfnür, V. Zielasek, C. Tegenkamp, T. Block, Z. Kallassy, Mater. Sci.-Pol. 2005, 25, 861.
33. a) S. Fujita, S. Maruno, H. Watanabe, M. Ichikawa, J. Vac. Sci. Technol. A 1997, 15, 1493;
34. b) H. Watanabe, K. Fujita, M. Ichikawa, Appl. Phys. Lett. 1997, 70, 1095.
35. a) D. P. Adams, T. M. Mayer, B. S. Swartzentruber, Appl. Phys. Lett. 1996, 68, 2210;
36. b) R. L. Kubena, F. P. Stratton, T. M. Mayer, J. Vac. Sci. Technol. B 1988, 6, 1865.
37. R. R. Kunz, T. M. Mayer, J. Vac. Sci. Technol. B 1988, 6, 1557.
38. Y. F. Guan, J. D. Fowlkes, S. T. Retterer, M. L. Simpson, P. D. Rack, Nanotechnology 2008, 19, 505302.
39. C. Fiori, R. A. B. Devine, Phys. Rev. Lett. 1984, 52, 2081.