Generation of ultrasmall nanostructures in oxide layers assisted by self-organization

Journal of Applied Physics

Volumn 103, Issue 6, 2008, Pages

  Block, T ^a   Pfnur H ^a  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; AUGER ELECTRON SPECTROSCOPY; ELECTRON BEAM LITHOGRAPHY; ELECTRON MICROSCOPY; NANOSTRUCTURES; SILICA;

AUGER EXCITATION PROCESS; SELF-ORGANIZATION; ULTRASMALL NANOSTRUCTURES; ULTRASMALL STRUCTURES;

ULTRATHIN FILMS;

EID: 41549092799     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2896413     Document Type: Article

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