Structural and mechanical properties of diamond-like carbon films deposited by direct current magnetron sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 4, 2003, Pages 851-859

  Broitman, E ^a   Hellgren, N ^b   Czigany Zs ^c   Twesten, R D ^b   Luning, J ^d   Petrov, I ^b   Hultman, L ^c   Holloway, B C ^a  

^a The College of William and Mary   (United States)

^b University of Illinois at Urbana Champaign   (United States)

^c LINKÖPING UNIVERSITY   (Sweden)

^d SLAC NATIONAL ACCELERATOR LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; AMORPHOUS MATERIALS; CRYSTAL MICROSTRUCTURE; ELASTIC MODULI; ELECTRON ENERGY LOSS SPECTROSCOPY; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; MORPHOLOGY; NANOSTRUCTURED MATERIALS; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; X RAY ANALYSIS;

FLUX RATIO; ION ENERGY; NANOMETER SIZED DOMAINS; X RAY ABSORPTION FINE STRUCTURE;

DIAMOND LIKE CARBON FILMS;

EID: 0043237217     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1575231     Document Type: Article

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