CrAlYCN/CrCN nanoscale multilayer PVD coatings deposited by the combined High Power Impulse Magnetron Sputtering/Unbalanced Magnetron Sputtering (HIPIMS/UBM) technology

Surface and Coatings Technology

Volumn 203, Issue 9, 2009, Pages 1237-1243

  Hovsepian, P Eh ^a   Ehiasarian, A P ^a   Ratayski, U ^b  

^a SHEFFIELD HALLAM UNIVERSITY   (United Kingdom)

^b TU BERGAKADEMIE FREIBERG   (Germany)

Author keywords

68.35.Np Adhesion; 81.05.Zx New materials: theory, design, and fabrication; 81.15.Cd Deposition by sputtering; 81.40.Pq Friction, lubrication, and wear; 81.65.Cf Surface cleaning, etching, patterning; Plasma pretreatment by High Power Impulse Magnetron Sputtering (HIPIMS)

Indexed keywords

ADHESION; ALUMINUM; CADMIUM ALLOYS; CARBIDES; CHROMATE COATINGS; CHROMIUM; COATINGS; CUTTING TOOLS; DC GENERATORS; ELECTRIC DISCHARGES; EPITAXIAL GROWTH; ETCHING; FRICTION; GRAVIMETRIC ANALYSIS; GROWTH (MATERIALS); LUBRICATION; MAGNETRON SPUTTERING; MAGNETRONS; METALLIC COMPOUNDS; MULTILAYERS; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; OXIDATION; PHASE INTERFACES; PLASMAS; SEMICONDUCTING CADMIUM COMPOUNDS; SEMICONDUCTING SILICON COMPOUNDS; SURFACE CLEANING; SURFACE DEFECTS; SURFACE TREATMENT; THERMOGRAVIMETRIC ANALYSIS; TRACE ANALYSIS; TRIBOLOGY;

68.35.NP ADHESION; 81.05.ZX NEW MATERIALS: THEORY, DESIGN, AND FABRICATION; 81.15.CD DEPOSITION BY SPUTTERING; 81.40.PQ FRICTION, LUBRICATION, AND WEAR; 81.65.CF SURFACE CLEANING, ETCHING, PATTERNING;

SURFACES;

EID: 58149483484     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2008.10.033     Document Type: Article

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