Modeling and analysis of electrostatic MEMS filters

Nonlinear Dynamics

Volumn 60, Issue 3, 2010, Pages 385-401

  Hammad, Bashar K ^a   Abdel Rahman, Eihab M ^b   Nayfeh, Ali H ^a  

^a Virginia Polytechnic Institute and State University   (United States)

^b UNIVERSITY OF WATERLOO   (Canada)

Author keywords

Capacitance transducers; Discretization; Filters; Localization; Modeling; Nonlinearities; Primary resonance

Indexed keywords

CAPACITANCE TRANSDUCERS; DISCRETIZATIONS; LOCALIZATION MODELING; NON-LINEARITY; PRIMARY RESONANCE;

CAPACITANCE; CIRCUIT RESONANCE; EIGENVALUES AND EIGENFUNCTIONS; ELECTRIC FURNACES; ELECTROMECHANICAL FILTERS; ELECTROSTATICS; MATHEMATICAL MODELS; NATURAL FREQUENCIES; TRANSDUCERS;

RESONATORS;

EID: 77953362882     PISSN: 0924090X     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11071-009-9603-z     Document Type: Article

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