An analytical design methodology for microelectromechanical (MEM) filters

Sensors and Actuators, A: Physical

Volumn 119, Issue 1, 2005, Pages 38-47

  Gurbuz, Yasar ^a   Parlak, Mustafa ^a   Bechteler, Thomas F ^a   Bozkurt, Ayhan ^a  

^a SABANCI UNIVERSITY   (Turkey)

Author keywords

Bandpass filters; Coupling spring; Electrical equivalent; MEMS; Series parallel RLC

Indexed keywords

BANDPASS FILTERS; BANDWIDTH; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; CRYSTAL RESONATORS; MICROMACHINING; TRANSDUCERS;

COUPLING SPRINGS; ELECTRICAL EQUIVALENT; SERIES/PARALLEL RLC;

MICROELECTROMECHANICAL DEVICES;

EID: 17144395190     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.08.031     Document Type: Article

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