Third-order intermodulation in microelectromechanical filters coupled with capacitive transducers

Journal of Microelectromechanical Systems

Volumn 15, Issue 1, 2006, Pages 141-148

  Alastalo, Arit T ^a   Kaajakari, Ville ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

Communications systems; Intermodualtion distortion; Microelectromechanical devices

Indexed keywords

ELECTRIC FILTERS; INTERMODULATION; RESONATORS; SIGNAL TO NOISE RATIO; TRANSDUCERS;

CAPACITIVE TRANSDUCERS; INTERMODULATION DISTORTION; SIGNAL-TO-INTERFERENCE RATIO; THIRD-ORDER MECHANICAL RESONATOR;

MICROELECTROMECHANICAL DEVICES;

EID: 32244432176     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.863705     Document Type: Article

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