The challenge of revealing and tailoring the dynamics of radio-frequency plasmas

Plasma Sources Science and Technology

Volumn 19, Issue 3, 2010, Pages

  Gans, T ^a   O'Connell, D ^a   Schulz Von Der Gathen, V ^b   Waskoenig, J ^a  

^a QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

^b RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE PLASMAS; CAPACITIVELY COUPLED; COMPLEX DYNAMICS; DUAL FREQUENCY; DUAL FREQUENCY OPERATION; ELECTRON AVALANCHES; EXCITATION MECHANISMS; FREQUENCY COMPONENTS; MODE TRANSITIONS; NUMERICAL SIMULATION; PHASE RESOLVED OPTICAL EMISSION SPECTROSCOPY; PLASMA BOUNDARY; PLASMA DYNAMICS; POWER DISSIPATION; RADIO FREQUENCY PLASMA; RELATIVE PHASE; SHEATH EXPANSION; SPATIO-TEMPORAL; WAVE-PARTICLE INTERACTIONS;

ATMOSPHERIC IONIZATION; ATMOSPHERIC PRESSURE; COMPUTER SIMULATION; ELECTRIC FIELDS; EMISSION SPECTROSCOPY; EXCITED STATES; IONIZATION; MAGNETOHYDRODYNAMICS; OPTICAL EMISSION SPECTROSCOPY; PARTICLE DETECTORS; PLASMA DIAGNOSTICS; PLASMAS; POPULATION STATISTICS;

DYNAMICS;

EID: 77953010060     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/19/3/034010     Document Type: Article

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