Space and time resolved rotational state populations and gas temperatures in an inductively coupled hydrogen RF discharge

Plasma Sources Science and Technology

Volumn 14, Issue 1, 2005, Pages 51-60

  Abdel Rahman, M ^a   Gans, T ^b   Schulz Von Der Gathen, V ^a   Dobele H F ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

^b RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTRODES; ELECTRON TRANSITIONS; HYDROGEN; MICROELECTRONICS; MOLECULAR VIBRATIONS; SPECTROSCOPY; SURFACE TREATMENT;

HYDROGEN PLASMAS; PARTICLE DENSITIES; PLASMA REACTORS; VIBRATIONAL SEQUENCES;

INDUCTIVELY COUPLED PLASMA;

EID: 14644443524     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/14/1/007     Document Type: Article

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