Computational study of capacitively coupled high-pressure glow discharges in helium

IEEE Transactions on Plasma Science

Volumn 31, Issue 4 II, 2003, Pages 495-503

  Yuan, Xiaohui ^a   Raja, Laxminarayan L ^a  

^a The University of Texas at Austin   (United States)

Author keywords

Capacitively coupled helium plasma; Computational modeling; High pressure glow (HPG) discharge; Plasma impurity effects

Indexed keywords

CARRIER CONCENTRATION; COMBUSTION; CURRENT DENSITY; DEPOSITION; HEATING; HELIUM; HIGH PRESSURE EFFECTS; PLASMA ETCHING; PLASMA SIMULATION; SURFACE TREATMENT; THIN FILMS;

PLASMA IMPURITY EFFECTS;

GLOW DISCHARGES;

EID: 0041426452     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2003.815479     Document Type: Article

References (39)

1. S. Kanazawa, M. Kogoma, T. Moriwaki, and S. Okazaki, "Stable glow plasma at atmospheric pressure," J. Phys. D, Appl. Phys., vol. 21, pp. 838-840, 1988.
2. S. Okazaki, M. Kogoma, M. Uehara, and Y. Kimura, "Appearance of stable glow discharge in air, argon, oxygen, and nitrogen at atmospheric pressure using a 50 Hz source," J. Phys. D, Appl. Phys., vol. 26, pp. 889-892, 1993.
3. M. Moisan, Z. Zakrzewski, R. Etmadi, and J. C. Rostaing, "Multitude surface-wave discharges for increased gas throughput at atmospheric pressure," J. Appl. Phys., vol. 83, pp. 5691-5701, 1998.
4. E. E. Kunhardt, "Generation of large-volume, atmospheric-pressure, nonequilibrium plasmas," IEEE Trans. Plasma Sci., vol. 28, pp. 189-200, Feb. 2000.
5. A. Schutze, J. Y. Jeong, S. E. Babayan, J. Park, G. S. Selwyn, and R. F. Hicks, "The atmospheric-pressure plasma jet: A review and comparison to other plasma source," IEEE Trans. Plasma Sci., vol. 26, pp. 1685-1694, Dec. 1998.
6. F. Massines, A. Rabehi, P. Decomps, R. Ben Gadri, P. Segur, and C. Mayoux, "Experimental and theoretical study of a glow discharge at atmospheric pressure controlled by dielectric barrier," J. Appl. Phys., vol. 83, pp. 2950-2957, 1998.
7. L. Mangolini, K. Orlov, U. Kortshagen, J. Heberlein, and U. Kogelschatz, "Radial structure of a low-frequency atmospheric-pressure glow discharge in helium," Appl. Phys. Lett., vol. 80, pp. 1722-1724, 2002.
8. 2 lasers," Appl. Phys. Lett., vol. 16, pp. 504-505, 1970.
9. M. J. Kushner, "Microarcs as a termination mechanism of optical pulses in electric-discharge-excited KrF excimer lasers," IEEE Trans. Plasma Sci., vol. 19, pp. 387-399, Apr. 1991.
10. T. Peterson and R. C. Brown, "Simulation of electric field effects in premixed methane flames," Combust. Flame, vol. 94, pp. 433-448, 1993.
11. J. Y. Jeong, S. E. Babayan, A. Schutze, V. J. Tu, J. Park, I. Henins, R. F. Hicks, and G. S. Selwyn, "Etching polyimide with a nonequilibrium atmospheric-pressure plasma jet," J. Vac. Sci. Technol. A, Vac. Surf. Films, vol. 17, pp. 2581-2585, 1999.
12. Y. Sawada, S. Ogawa, and M. Kogoma, "Synthesis of plasma-polymerized tetraethoxysilane and hexamethyldisiloxane films prepared by atmospheric pressure glow discharge," J. Phys. D, Appl. Phys., vol. 28, pp. 1661-1669, 1995.
13. 2O glow dielectric barrier-controlled discharge at atmospheric pressure," J. Phys. D, Appl. Phys., vol. 33, pp. L104-L108, 2000.
14. F. Massines and G. Gouda, "A comparison of polypropylene-surface treatment by filamentary, homogeneous and glow discharges in helium at atmospheric pressure," J. Phys. D, Appl. Phys., vol. 31, pp. 3411-3420, 1998.
15. M. Kogoma and S. Okazaki, "Raising of ozone formation efficiency in a homogeneous glow discharge plasma at atmospheric pressure," J. Phys. D, Appl. Phys., vol. 24, pp. 1985-1987, 1994.
16. J. R. Roth, D. M. Sherman, R. B. Gadri, F. Karakaya, Z. Chen, T. C. Montie, K. Kelly-Wintenberg, and P. P.-Y. Tsai, "A remote exposure reactor (RER) for plasm processing and sterilization by plasma active species ate one atmosphere," IEEE Trans. Plasma Sci., vol. 28, pp. 56-63, Feb. 2000.
17. R. J. Vidmar, "On the use of atmopheric pressure plasmas as electromagnetic reflectors and absorbers," IEEE Trans. Plasma Sci., vol. 19, pp. 733-741, Aug. 1990.
18. W. W. Destler, J. E. DeGrange, H. H. Fleischmann, J. Rodgers, and Z. Seglov, "Experimental studies of high-power microwave reflection, transmission, and absorption from a plasma-covered plane conducting boundary," J. Appl. Phys., vol. 69, pp. 6313-6318, 1991.
19. Yu. P. Raizer, Gas Discharge Physics. Berlin, Germany: Springer-Verlag, 1991.
20. P. D. Slade and A. Serafetinides, "Stable discharge in an HF laser within large electrode separation," IEEE J. Quantum Electron., vol. QE-14, pp. 321-322, May 1978.
21. Yu. S. Akishev, A. A. Deryugin, V. B. Karal'nik, I. V. Kochetov, A. P. Napartovich, and N. I. Trushkin, "Numerical simulation and experimental study of an atmospheric-pressure direct-current glow discharge," Plasma Phys. Rep., vol. 20, pp. 511-524, 1994.
22. W. W. Byszewski, "Diffuse discharges at high-current density," J. Appl. Phys., vol. 66, pp. 103-107, 1989.
23. M. Moisan, R. Pantel, J. Hubert, E. Bloyet, P. Leprince, J. Marec, and A. Ricard, "Production and applications of microwave surface plasma at atmospheric pressure," J. Microwave Power, vol. 14, pp. 57-61, 1979.
24. J. Park, I. Henins, H. W. Herrmann, and G. S. Selwyn, "Gas breakdown in an atmospheric pressure radio-frequency capacitive plasma source," J. Appl. Phys., vol. 89, pp. 15-19, 2001.
25. J. Park, I. Henins, H. W. Hermann, G. S. Selwyn, and R. F. Hicks, "Discharge phenomena of an atmospheric pressure radio-frequency capacitive plasma source," J. Appl. Phys., vol. 89, pp. 20-28, 2001.
26. J. Park, I. Henins, H. W. Hermann, G. S. Selwyn, J. Y. Jeong, R. F. Hicks, D. Shim, and C. S. Chang, "An atmospheric pressure plasma source," Appl. Phys. Lett., vol. 76, pp. 288-290, 2000.
27. X. Yuan and L. L. Raja, "Role of trace impurities in large-volume noble gas atmopheric-pressure glow discharges," Appl. Phys. Lett., vol. 81, pp. 814-816, 2002.
28. T. R. Govindan and M. Meyyappan, "One-dimensional modeling studies of the gaseous electronics conference RF reference cell," J. Res. Natl. Inst. Stand. Technol., vol. 100, pp. 463-472, 1995.
29. S. Rauf and M. J. Kushner, "Dynamics of a coplanar-electrode plasma display panel cell," J. Appl. Phys., vol. 85, pp. 3460-3469, 1999.
30. J. W. Shon and M. J. Kushner, "Excitation mechanism and gain modeling of the high-pressure atomic Ar laser in He/Ar mixtures," J. Appl. Phys., vol. 75, pp. 1883-1890, 1994.
31. 3 using a monte carlo-fluid hybrid model," J. Appl. Phys., vol. 71, pp. 1654-1673, 1992.
32. C. O. Laux, L. Yu, D. M. Packan, R. J. Gessman, L. Pierrot, C. H. Kruger, and R. N. Zare, "Ionization mechanisms in two-temperature air plasmas," presented at the 30th AIAA Plasmadynamics and Lasers Conf., Norfolk. VA, 1999, AIAA Paper 99-3476.
33. M. Surendra and D. B. Graves, "Particles simulations of radio-frequency glow discharges," IEEE Trans. Plasma Sci., vol. 19, pp. 144-157, Apr. 1991.
34. D. P. Lymberopoulos and D. J. Economou, "Fluid simulations of glow discharges: Effect of metastable atoms in argon," J. Appl. Phys., vol. 73, pp. 3668-3679, 1993.
35. R. J. Kee, G. Dixon-Lewis, J. Warnatz, M. E. Coltrin, and J. A. Miller, "A Fortran computer code package of gas-phase multicomponent transport properties," Sandia Nat. Lab., Livermore, CA, Rep. SAND86-8246, 1995.
36. H. W. Ellis, R. Y. Pai, E. W. McDaniel, E. A. Mason, and L. A. Viehland, "Transport properties of gaseous ions over a wide energy range," Atomic Data Nucl. Data Tables, vol. 17, pp. 177-210, 1976.
37. M. S. Barnes, J. C. Forster, and J. H. Keller, "Ion kinetics in low-pressure, electropositive, RF glow discharge sheaths," IEEE Trans. Plasma Sci., vol. 19, pp. 240-244, Apr. 1991.
38. P. A. Miller and M. E. Riley, "Dynamics of collisionless RF plasma sheaths," J. Appl. Phys., vol. 82, pp. 3689-3709, 1997.
39. L. L. Raja and M. Linne, "Analytical model for ion angular distribution functions at RF biased surfaces with collisionless plasma sheaths," J. Appl. Phys., vol. 93, pp. 7032-7040, 2003.